Ion beam apparatus

An ion beam apparatus comprising a source of ions, an evacuatable chamber, first and second electrodes disposed within said chamber and adjacent said ion source for forming an ion beam from ions from said source, the first electrode being electrically insulated from the second electrode and including at least one insulating member, at least part of which is within said chamber, to provide said insulation, and part of which is adjacent the wall of said chamber, wherein said electrode is mechanically coupled to a part of the wall of said chamber, said part of the wall being arranged to separate, at least partially, said electrode from said insulating member and adapted to permit said electrode to move in at least one direction relative to said ion source.

An ion beam apparatus comprising a source of ions, an evacuatable chamber, first and second electrodes disposed within said chamber for forming an ion beam from ions from said source, the first electrode being electrically insulated from the second electrode and including at least one insulating member, at least part of which is within said chamber, to provide said insulation, and a part of which is adjacent the wall of said chamber, first and second supports extending from said first and second electrodes, respectively, and each arranged to support a respective said electrode at a position substantially at or outside the wall of said chamber and wherein the wall of said chamber is adapted to allow both said first and second supports to move in at least one direction relative to said ion source, thereby allowing the position of said electrodes relative to said ion source to be changed.

An ion beam apparatus comprising a source of ions, an evacuatable chamber, first and second electrodes disposed within said chamber for forming an ion beam from ions from said source, the first electrode being electrically insulated from the second electrode and including at least one insulating member, at least part of which is within said chamber, to provide said insulation, and a part of which is adjacent the wall of said chamber, said electrode being mechanically coupled to a part of the wall of said chamber, said part of the wall being arranged to separate, at least partially, said electrode from said insulating member and wherein the cross-sectional area of said part of the wall through which heat is conducted from said electrode to said insulating member is such as to oppose thermal conduction therethrough to thermally insulate said insulating member from said electrode.

An ion beam apparatus comprising a source of ions, an evacuatable chamber, first and second electrodes disposed within said chamber for forming an ion beam from ions from said source, the first electrode being electrically insulated from the second electrode and including at least one insulating member, at least part of which is within said chamber, to provide said insulation, and a part of which is adjacent the wall of said chamber, and further including a removable cover comprising an electrically insulating material and arranged to cover at least part of the surface of said insulating member within said chamber.