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US 5,916,689 AGranted
Electrostatic chuck with an impregnated, porous layer that exhibits the Johnson-Rahbeck effect
AssigneeApplied Materials, Inc.
InventorsKenneth S. Collins, Joshua Chin-Wing Tsui, Douglas Buchberger
Life of this patent
Estimating the term…
Abstract
An electrostatic chuck including a pedestal having a conductive upper surface; and a layer of plasma-sprayed material formed on the upper surface of the pedestal and defining a surface onto which a substrate is placed during use, wherein the plasma-sprayed material exhibits the Johnson-Rahbeck effect when a bias is applied between the substrate and the pedestal.
Claims22
An electrostatic chuck comprising:
- a pedestal having a conductive upper surface;
- and
- a layer of plasma-sprayed material formed on the upper surface of the pedestal and defining a surface onto which a substrate is placed during use, wherein said plasma-sprayed material exhibits the Johnson-Rahbeck effect when a bias is applied between the substrate and the pedestal.
An electrostatic chuck comprising:
- a pedestal having a conductive upper surface;
- and
- a layer of plasma-sprayed material formed on the upper surface of the pedestal and defining a surface onto which a substrate is placed during use, wherein when a bias is applied between the substrate and the pedestal said plasma-sprayed material exhibits a clamping force that is substantially higher than is producible with said layer being made of an ideal dielectric.
An electrostatic chuck comprising:
- a pedestal having a conductive upper surface;
- and
- a layer of porous dielectric material formed on said upper surface of said pedestal, said layer being impregnated with a plasma-resistant sealant and defining a surface onto which a substrate is placed during use, wherein said impregnated porous dielectric material exhibits the Johnson-Rahbeck effect when a bias is applied between the substrate and the pedestal.
An electrostatic chuck comprising:
- a pedestal having a conductive upper surface;
- and
- a layer of porous dielectric material formed on said upper surface of said pedestal, said layer being impregnated with a plasma-resistant sealant and defining a surface onto which a substrate is placed during use, wherein when a bias is applied between the substrate and the pedestal said impregnated, porous material exhibits a clamping force that is substantially higher than is producible with said layer being made of an ideal dielectric.
Dependencies are inferred from the claim text.