Sealed actuator

A sealed actuator comprising:

• a motor stator including a stator magnetic pole excited by a rotation-drive coil;
• a housing to which said motor stator is attached;
• a motor rotor including a rotor magnetic pole disposed opposite to a surface of said stator magnetic pole through a gap;
• bearings for rotatably supporting a rotation shaft of said motor rotor to said housing;
• displacement measuring means for measuring displacement of said motor rotor;
• and
• a hermetically sealing partition wall made of a nonmagnetic metal material and disposed at the gap between said stator magnetic pole and said rotor magnetic pole, a space where said motor rotor is disposed being hermetically isolated from a space wherein said motor stator is disposed;
• wherein said displacement measuring means comprises a resolver rotor made of a mass of magnetic metal material, disposed at a side of said motor rotor, and includes a salient tooth cut from said mass of magnetic metal material;
• and a resolver stator including a detection coil magnetic pole and disposed at a side of said motor stator.

A sealed actuator comprising:

• a motor stator including a stator magnetic pole excited by a rotation-drive coil;
• a housing to which said motor stator is attached;
• a motor rotor including a rotor magnetic pole disposed opposite to a surface of said stator magnetic pole through a gap;
• bearings for rotatably supporting a rotation shaft of said motor rotor to said housing;
• displacement measuring means for measuring displacement of said motor rotor;
• and
• a hermetically sealing partition wall made of a nonmagnetic metal material and disposed at the gap between said stator magnetic pole and said rotor magnetic pole, a space where said motor rotor is disposed being hermetically isolated from a space where said motor stator is disposed;
• wherein said sealed actuator further comprises reinforcing means for reinforcing at least a part of said hermetically sealing partition wall, said reinforcing means being made of substantially the same nonmagnetic metal material as said partition wall.

A sealed actuator comprising a plurality of unit sealed actuators connected in series to each other, each of said unit sealed actuators comprising:

• a motor stator including a stator magnetic pole excited by a rotation-drive coil;
• a housing to which said motor stator is attached;
• a motor rotor including a rotor magnetic pole disposed opposite to a surface of said stator magnetic pole through a gap;
• bearings for rotatably supporting a rotation shaft of said motor rotor to said housing;
• displacement measuring means for measuring displacement of said motor rotor;
• and
• a hermetically sealing partition wall made of a nonmagnetic metal material and disposed at the gap between said stator magnetic pole and said rotor magnetic pole, a space where said motor rotor is disposed being hermetically isolated from a space where said motor stator is disposed;
• wherein said bearings are a plurality of rolling bearings, said rolling bearings supporting said motor rotor at positions on said housings at both sides of a member constituting said sealing partition wall in a longitudinal direction of said motor rotor so that said housings directly receive a load applied to said bearings;
• wherein said rotor magnetic pole includes a salient pole tooth of a steel material of a magnetic substance subjected to salient pole working;
• and
• wherein said displacement measuring means comprises a resolver rotor made of a magnetic metal material, disposed at a side of said motor rotor, and include a salient pole tooth;
• and a resolver stator including a detection coil magnetic pole and disposed at a side of said motor stator.

A sealed actuator comprising a plurality of unit sealed actuators connected in series to each other, each of said unit sealed actuators comprising:

• a motor stator including a stator magnetic pole excited by a rotation-drive coil;
• housings to which said motor stator is attached;
• a motor rotor including a rotor magnetic pole disposed opposite to a surface of said stator magnetic pole through a gap;
• bearings for rotatably supporting a rotation shaft of said motor rotor to said housing;
• displacement measuring means for measuring displacement of said motor rotor;
• and
• a hermetically sealing partition wall made of a nonmagnetic metal material and disposed at the gap between said stator magnetic pole and said rotor magnetic pole, a space where said motor rotor is disposed being hermetically isolated from a space where said motor stator is disposed;
• wherein said bearings are a plurality of rolling bearings, said rolling bearings supporting said motor rotor at positions on said housings at both sides of a member constituting said sealing partition wall in a longitudinal direction of said motor rotor so that said housings directly receive a load applied to said bearings.

A sealed actuator comprising a plurality of unit sealed actuators connected in series to each other, each of said unit sealed actuators comprising:

• a motor stator including a stator magnetic pole excited by a rotation-drive coil;
• a housing to which said motor stator is attached;
• a motor rotor including a rotor magnetic pole disposed opposite to a surface of said stator magnetic pole through a gap;
• bearings for rotatably supporting a rotation shaft of said motor rotor to said housing;
• displacement measuring means for measuring displacement of said motor rotor;
• and
• a hermetically sealing partition wall made of a nonmagnetic metal material and disposed at the gap between said stator magnetic pole and said rotor magnetic pole, a space where said motor rotor is disposed being hermetically isolated from a space where said motor stator is disposed;
• wherein said displacement measuring means comprises a resolver rotor made of a magnetic metal material, disposed at a side of said motor rotor, and including a salient tooth;
• and a resolver stator including a detection coil magnetic pole and disposed at a side of said motor stator.