Apparatus and method for regulating pressure in two chambers
AssigneesTokyo Electron Limited, Varian Japan K.K.T
InventorsSusumu Kato, Masahito Ozawa, Sunao Muraoka
Life of this patent
Estimating the term…
Abstract
A gas is supplied to a second chamber so that the pressure in the second chamber is raised to a predetermined level. A communication passage is provided for internally connecting the first and second chambers. When the pressure in the first chamber attains the predetermined level, the gas is allowed to flow from the second chamber into the first chamber through the communication passage. A gas flow can be checked when an open-close door is opened to connect the chambers. Thus, there is no substantial gas flow, so that particles can be prevented from being flung up.
Claims13
An apparatus for regulating pressures in first and second chambers which can communicate with each other through an open-close door, whereby the difference in pressure between the chambers is adjusted to approximately zero when the pressure in the second chamber is higher than the pressure in the first chamber, comprising:
- gas supply means for supplying a gas to the second chamber, thereby raising the pressure in the second chamber to a selected level;
- communication means for internally connecting the first and second chambers;
- and
- release means for allowing the gas to flow from the second chamber into the first chamber through the communication means when the selected level is attained by the pressure in the second chamber, wherein
- said communication means includes a pipe located in the open-close door between the first and second chambers and internally connecting the chambers.
A method for regulating pressures in first and second chambers which can communicate with each other through an open-close door, whereby the difference in pressure between the chambers is adjusted to approximately zero when the pressure in the second chamber is higher than the pressure in the first chamber, comprising the steps of:
- supplying a gas to the second chamber, thereby raising the pressure in the second chamber to a selected level;
- and
- allowing the gas to flow from the second chamber into the first chamber through communication means when the selected level is attained by the pressure in the second chamber, wherein
- said gas is allowed to flow from the second chamber into the first chamber through a pipe located in the open-close door between the first and second chambers.
A multi-chamber process apparatus comprising:
- means defining first and second chambers,
- an open-close door through which said chambers can communicate with each other, and
- means for regulating pressures in said first and second chambers whereby the difference in pressure between said chambers is adjusted to approximately zero when the pressure in the second chamber is higher than the pressure in the first chamber, said means for regulating pressures including:
- gas supply means for supplying a gas to said second chamber, thereby raising the pressure in said second chamber to a selected level;
- communication means for internally connecting said first and second chambers;
- and
- release means for allowing the gas to flow from said second chamber into said first chamber through said communication means when said selected level is attained by the pressure in said second chamber, wherein
- said communication means includes a pipe located in said open-close door between said first and second chambers and internally connecting said chambers.
Dependencies are inferred from the claim text.