A method of measuring ion concentration of a solution with an apparatus comprising a reference device and an ion sensitive field effect transistor (ISFET) having a drain, a source, an ion sensitive gate region and a plurality of device characteristics, wherein the ion sensitive gate region and the reference device are exposed to and separated by the solution, the method comprising:
- applying a drain-source voltage V.sub.DS across the drain and source;
- operating the ISFET at n successive drain currents I.sub.Di and corresponding gate-source voltages V.sub.GSi such that the ISFET has an isopotential ion concentration point which is different for each of the n successive drain currents I.sub.Di and corresponding gate-source voltages V.sub.GSi, wherein i is an integer variable from 1 to n and n is an integer greater than 1, and wherein the drain currents flow through the drain of the ISFET and the gate-source voltages are referenced between the reference device and the source;
- storing the plurality of device characteristics and the n successive drain currents I.sub.Di and gate-source voltages V.sub.GSi ;
- measuring ion concentration of the solution as a function of at least one of the n successive drain currents I.sub.Di and gate-source voltages V.sub.GSi and the stored device characteristics;
- and
- measuring at least one of the device characteristics of the ISFET as a function of the n successive drain currents I.sub.Di and gate-source voltages V.sub.GSi.