Process and device for determining three-dimensional structure in the submicron range

A device for defining three-dimensional structures of an object having a size in the submicrometer range, the device comprising:

• a beam splitter for splitting a coherent beam, into two partial beams including a first partial beam and a second partial beam;
• a focusing lens for focusing the first partial beam on a focusing diameter being in the wavelength range of the coherent beam, on or in the object;
• a detector field containing several interdependent detectors for detecting a superimposition of the second partial beam upon redirection and the first partial beam upon reflection from the object;
• an evaluating unit connected to the detectors, having several first memory units for electrical values received from each of the detectors;
• a first calculating unit connected to the first memory units for determining complex amplitudes using the electrical values stored in the first memory units;
• a plurality of second memory units connected to the first calculating unit for storing the complex amplitude values;
• a multiplier unit connected to the second memory units for the mathematical multiplication of initial phase values to obtain second phase values for the complex amplitude values, using a factor determined by a desired magnification of the object structure of the object;
• a plurality of third memory units connected to the multiplier unit for storing the second phase values obtained via the multiplication;
• a second multiplier unit connected to the second and third memory units for determining the magnified object structure from the second phase values and the intensity values stored in the second memory units via a mathematical algorithm in the second multiplier unit;
• a display unit, connected to the second multiplier unit, for displaying the magnified object image or holographic image determined from the second calculating unit.

A method for defining a three-dimensional structure of an object having a submicrometer size, the method comprising the steps of:

• splitting a coherent electromagnetic radiation beam into two partial beams including a first partial beam and a second partial beam;
• reflecting the first partial beam from the object to yield a first radiation traversing through a focusing lens toward a locus region being monitored by detectors;
• directing a second partial beam to form a second radiation so as to create an electromagnetic combination of the first and second radiation at the locus;
• detecting electromagnetic parameters of an electromagnetic field of the electromagnetic combination associated with the locus to convert the electromagnetic parameters into electrical signals;
• establishing second phase values from initial phase values of the electromagnetic field, as represented by the electrical signals, via multiplication of the initial phase values by at least one predetermined value;
• and
• generating a magnified image representative of the object by using the second phase values, the electromagnetic parameters, and coordinates of the detectors relative to the locus.

An apparatus for defining a three-dimensional structure of an object having a submicrometer size, the apparatus comprising:

• a splitter for splitting a coherent electromagnetic radiation beam into two partial beams including a first partial beam and a second partial beam;
• a focusing lens for focusing the first partial beam on the object and for passing a first radiation reflected from the object toward a locus region;
• a beam-directing system for directing a second partial beam to form a second radiation so as to create an electromagnetic combination of the first and second radiation at the locus region;
• detectors for monitoring the locus region and for providing electrical signals responsive to electromagnetic parameters of the electromagnetic combination associated with the locus region;
• a calculator for calculating second phase values from initial phase values of the electromagnetic combination, as represented by the electrical signals, via multiplication of the initial phase values by at least one predetermined value;
• and
• an image generator for generating a magnified image representative of the object by using the second phase values, the electromagnetic parameters, and coordinates of the detectors relative to the locus region.