Polishing apparatus having interlock function

A polishing apparatus for polishing a surface of a workpiece and having an interlock function, said apparatus comprising:

• a turntable having thereon a polishing surface;
• a top ring for holding a workpiece to be polished and for pressing the workpiece against said polishing surface;
• a plurality of components including first motor for rotating said turntable, a second motor for rotating said top ring, a first actuator for lowering said top ring, and a second actuator for moving said top ring in a horizontal direction;
• a torque detector for measuring a torque of said second motor;
• a vibration detector for measuring vibration of said top ring;
• and
• a control unit for, when at least one of values measured by said torque detector and by said vibration detector is indicative of an abnormal value representative of a change of said second motor or of said top ring other than a change of a surface condition of the workpiece being polished, causing said first actuator to lift said top ring and causing said second motor to stop rotation of said top ring.

A method of polishing a surface of a workpiece, said method comprising:

• rotating a turntable having a polishing surface by a first motor during normal operation thereof;
• rotating a top ring by a second motor during normal operation thereof;
• holding a workpiece by said top ring and pressing said workpiece against said polishing surface by a first actuator during normal operation thereof;
• moving said top ring and said workpiece held thereby in a horizontal direction by a second actuator during normal operation thereof;
• at least one component among said first motor, said second motor, said first actuator and said second actuator being capable of developing an abnormality indicative of a change of said at least one component other than a change of a surface condition of said workpiece during polishing thereof;
• detecting development of said abnormality in said at least one component;
• and
• in response to said detecting, causing another one of said components, other than said at least one component in which said abnormality is detected, to perform a predetermined operation other than said normal operation thereof, said causing comprising at least operating said first actuator to lift said top ring.

A method of polishing a surface of a workpiece, said method comprising:

• rotating a turntable having a polishing surface by a first motor;
• rotating a top ring by a second motor;
• holding a workpiece by said top ring and pressing said workpiece against said polishing surface by a first actuator;
• moving said top ring and said workpiece held thereby in a horizontal direction by a second actuator;
• measuring a torque of said second motor;
• measuring vibration of said top ring;
• and
• when at least one of a measured value of said torque and a measured value of said vibration is indicative of an abnormal value representative of a change of said second motor or of said top ring other than a change of a surface condition of said workpiece being polished, causing said first actuator to lift said top ring and causing said second motor to stop rotation of said top ring.