Process for producing spatially patterned components
AssigneeMicronas Intermetall GmbH
InventorsGuenter Igel, Martin Mall
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Abstract
A process is disclosed for producing spatially patterned components from a body. On the backside of the body, a retardation layer with openings is provided for retarding a removal of the material of the body, and areas of migration-capable material are deposited. The body is subjected to a thermal migration process to form migration regions. Then, in a single material removal step, the components are separated from the body and the migration regions are exposed.
Claims17
A process for producing spatially patterned components from a body, comprising the steps of:
- providing on the backside of the body a retardation layer for retarding a removal of the material of the body, said retardation layer having openings in separation regions for separating the components;
- depositing a layer of migration-capable material on the backside of the body and patterning said layer in such a way as to form at least one area of the migration-capable material per component on the backside of the body;
- subjecting the body to a migration process whose parameters are chosen so that part of the migration-capable material will reach a predetermined area near the front side of the body, wherein migration regions are formed in the body;
- and
- in a single material removal step, separating the components from the body and baring the migration regions or the material lying between the migration regions.
A method for producing spatially patterned components from a body, comprising the steps of:
- providing on the backside of the body a retardation layer for retarding a removal of the material of the body, said retardation layer having openings in separation regions for separating the components;
- depositing a layer of migration-capable material on the backside of the body and patterning said layer in such a way as to form at least one area of the migration-capable material per component on the backside of the body;
- subjecting the body to a migration process whose parameters are chosen so that part of the migration-capable material will reach a predetermined area near the front side of the body, wherein migration regions are formed in the body;
- and
- in a single material removal step, separating the components from the body and baring the migration regions or the material lying between the migration regions to form a heat sink.
A method for producing spatially patterned components from a semiconductor body, said method comprising the steps of:
- forming at least one active region on a front side of said body to enable formation of at least one electronic device;
- depositing a layer of migration-capable material on a backside of said body and patterning said layer in such a way as to form at least one area of the migration-capable material per component on said backside of said body, said backside of said body being oppositely disposed from said front side;
- forming migration regions in said body by subjecting said body to a migration process wherein said migration-capable material will reach a predetermined area near said front side of the body;
- forming a retardation layer on said backside of said body, said retardation layer for retarding removal of the material of said body and having openings in separation regions for separating said components;
- and,
- in a single material removal step, separating said components from said body and baring the migration regions or the material lying between the migration regions.
Dependencies are inferred from the claim text.