Closed loop liquid cooling for semiconductor RF amplifier modules
AssigneeNorthrop Grumman Corporation
InventorsRobin E. Hamilton, Thomas J. Fagan, Paul G. Kennedy, William S. Woodward
Life of this patent
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Abstract
A closed loop liquid cooling system for an RF transistor module including a plurality of elongated microchannels connected between a pair of coolant manifolds for conducting liquid coolant beneath one or more transistor dies to dissipate the heat generated thereby, a heat exchanger, a miniature circulating pump located on the module, and passive check valves having tapered passages for controlling the flow of coolant in the loop. The valves are truncated tapered passage microchannel valves having no moving parts and are fabricated so as to be a part of either the circulating pump, the coolant manifolds, or the microchannels.
Claims17
A microchannel liquid cooling system for dissipating heat generated in a semiconductor module, comprising:
- a semiconductor substrate;
- a plurality of microchannels and a pair of coolant manifolds therefor formed in said substrate below at least one semiconductor device for conducting a coolant therethrough;
- a heat exchanger;
- a coolant circulating pump;
- said pump, said microchannels, and said heat exchanger being connected in a closed loop coolant circulating path;
- and
- a pair of passive check valves having no moving parts formed in said substrate adjacent said manifolds for controlling the flow of coolant in said coolant circulating path.
A microchannel liquid cooling system for dissipating heat generated in a semiconductor module, comprising:
- a semiconductor substrate;
- a plurality of microchannels and a pair of coolant manifolds therefor formed in said substrate below at least one semiconductor device for conducting a coolant therethrough;
- a heat exchanger;
- a coolant circulating pump;
- said pump, said microchannels, and said heat exchanger being connected in a closed loop coolant circulating path;
- and
- a pair of passive check valves formed in the substrate and having tapered passages, comprising a truncated polyhedron or truncated cone, said check valves being located immediately adjacent said coolant manifolds for controlling the flow of coolant in said circulating path.
Dependencies are inferred from the claim text.