X-ray analysis apparatus provided with a double collimator mask

Abstract

A Soller slit 16 in an X-ray spectrometer can parallelize fluorescent radiation which emanates from a specimen 4 and is to be analyzed according to wavelength by an analyzer crystal 18. Because the aim is to irradiate an as large as possible surface of the specimen 4 by means of primary X-rays 10, inevitably disturbing fluorescent radiation is also generated by the environment of the specimen, for example the specimen holder 6. In order to intercept this disturbing radiation so that it cannot reach the X-ray detector, a collimator mask 12 is arranged in a fixed location in the beam path. In the case of varying specimen dimensions it is not always possible to choose such dimensions for this mask that the disturbing radiation is intercepted. Therefore, a second collimator mask 28 is provided (behind the Soller slit 16) in order to intercept the disturbing radiation in cooperation with the first mask 12.

Dependencies are inferred from the claim text.