Laser processing apparatus

A laser processing apparatus for processing a semiconductor film comprising:

• a laser device for emitting a laser beam having a cross section;
• a lateral flyeye lens for homogenizing an energy distribution of said laser beam in a widthwise direction;
• a cylindrical convex lens for condensing the laser beam after passing through the lateral flyeye lens in only the widthwise direction;
• a mirror for directing said laser beam after passing through said cylindrical convex lens to said semiconductor film;
• and
• a condensing means for condensing said laser beam only in the widthwise direction in order to form a condensed laser beam at said semiconductor film, said condensing means being located on an optical path between said mirror and said semiconductor film;
• and
• moving means for relatively moving said semiconductor film relative to said laser beam in said widthwise direction,
• wherein a distance X.sub.3 between a focus of said cylindrical convex lens and the mirror, a distance X.sub.4 between the mirror and said condensing means, a distance X.sub.5 between said condensing means and said semiconductor film satisfy the following conditions:
• 1/F=1/(X.sub.3 +X.sub.4)+1/X.sub.5, F is a focal distance of the condensing means.

A laser processing apparatus for processing a semiconductor film comprising:

• a laser device for emitting a laser beam having a cross section;
• a lateral flyeye lens for homogenizing an energy distribution of said laser beam in a widthwise direction;
• a cylindrical convex lens for condensing the laser beam after passing through the lateral flyeye lens in only the widthwise direction;
• a mirror for directing said laser beam after passing through said cylindrical convex lens to said semiconductor film;
• a condensing means for condensing said laser beam only in the widthwise direction, said condensing means being located on an optical path between said mirror and said semiconductor film;
• and
• moving means for relatively moving said semiconductor film relative to said laser beam in said widthwise direction,
• wherein a distance X.sub.3 between a focus of said cylindrical convex lens and the mirror, a distance X.sub.4 between the mirror and said condensing means, a distance X.sub.5 between said condensing means and said semiconductor film satisfy the following conditions:
• M=(X.sub.3 +X.sub.4)/X.sub.5 where M is a magnification.

A laser processing apparatus for processing a semiconductor film comprising:

• a laser device for emitting a laser beam having a first cross section;
• a lateral flyeye lens for homogenizing an energy distribution of said laser beam in a widthwise direction of the cross section;
• a first cylindrical convex lens for condensing the laser beam after passing through the lateral flyeye lens in only the widthwise direction,
• a second cylindrical convex lens for condensing said laser beam having passed through said first cylindrical convex lens in said widthwise direction,
• wherein a magnification M satisfies the following relation:
• M=(an optical path length between the focus of said first cylindrical convex lens and the second cylindrical convex lens)/(an optical path length between the second cylindrical convex lens and said semiconductor film), and;
• means for relatively moving said semiconductor film with respect to the condensed laser beam.

A laser processing apparatus for processing a semiconductor film comprising:

• a laser device for emitting a laser beam having a first cross section;
• a lateral flyeye lens for homogenizing an energy distribution of said laser beam in a widthwise direction of the cross section;
• a first cylindrical convex lens for condensing the laser beam after passing through the lateral flyeye lens in only the widthwise direction;
• a second cylindrical convex lens for condensing said laser beam having passed through said first cylindrical convex lens in said widthwise direction,
• wherein a focal length F of the second cylindrical convex lens satisfies the following relation:
• 1/F=1/(an optical path length between the focus of the first cylindrical convex lens and the second cylindrical convex lens)+1/(an optical path length between the second cylindrical convex lens and said semiconductor film), and
• means for relatively moving said semiconductor film with respect to the condensed laser beam.

A laser processing apparatus for processing a semiconductor film comprising:

• a laser device for emitting a laser beam having a first cross section;
• a lateral flyeye lens for homogenizing an energy distribution of said laser beam in a widthwise direction of the cross section;
• a first cylindrical convex lens for condensing the laser beam after passing through the lateral flyeye lens in only the widthwise direction;
• a second cylindrical convex lens for condensing said laser beam after passing through said first cylindrical convex lens only in said widthwise direction,
• wherein said second cylindrical convex lens is distant from said first cylindrical convex lens by a distance larger than a focal length of said first cylindrical convex lens, and
• means for relatively moving said semiconductor film with respect to the laser beam condensed by the second cylindrical convex lens.

A laser processing apparatus for processing a semiconductor film comprising:

• a laser device for emitting a laser beam having a first cross section;
• a lateral flyeye lens for homogenizing an energy distribution of said laser beam in a widthwise direction of the cross section;
• a vertical flyeye lens for homogenizing an energy distribution of said laser beam in a lengthwise direction of the cross section;
• a first cylindrical convex lens for condensing the laser beam after passing through the lateral flyeye lens in only the widthwise direction;
• a second cylindrical convex lens for condensing said laser beam after passing through said vertical flyeye lens only in said lengthwise direction,
• a third cylindrical convex lens for condensing said laser beam after passing through said first and second cylindrical convex lenses only in said widthwise direction;
• and
• wherein said third cylindrical convex lens is distant from said first cylindrical convex lens by a distance larger than a focal length of said first cylindrical convex lens, and
• means for relatively moving said semiconductor film with respect to said condensed laser beam condensed by said third cylindrical convex lens.