Discharge methods and electrodes for generating plasmas at one atmosphere of pressure, and materials treated therewith

An apparatus for treating a surface of a substrate, including web and film substrates, to improve properties of the surface of the substrate, comprising:

• a pair of electrodes, wherein each of the electrodes has an electrode face, wherein the faces of the electrodes are in opposing spaced relation to each other to establish a working volume between the opposing faces of the electrodes, and wherein one of the electrode faces has a plurality of holes which communicate with the working volume;
• means for introducing a working gas at or about one atmosphere of pressure and at a determined temperature, humidity and flow rate into the working volume;
• and
• means for exciting the electrodes to generate a uniform, steady state, glow discharge plasma in the working gas at or about one atmosphere of pressure, for treating the surface of the substrate with species of the generated plasma, wherein the exciting means is an asymmetrical voltage pulse with a variable pulse repetition frequency of from 1 to 100 kHz.

A method for treating a surface of a substrate, including web and film substrates, to improve properties of the surface of the substrate, with a pair of electrodes, wherein each of the electrodes has an electrode face and wherein the faces of the electrodes are in opposing spaced relation to each other, the method comprising the steps of:

• establishing a working volume between the opposing faces of the electrodes, wherein one of the electrode faces has a plurality of holes which communicate with the working volume;
• introducing a working gas at a determined temperature, humidity and flow rate into the working volume;
• and
• exciting the electrodes with a tuned, resonant circuit which generates a resonant response having a center frequency of from 1 to 30 MHz to generate a uniform, steady state, glow discharge plasma in the working gas and at or about one atmosphere of pressure while passing the working gas through the holes in the electrode face, for treating the surface of the substrate with species of the generated plasma.

An apparatus for treating a surface of a substrate, including web and film substrates, to improve properties of the surface of the substrate, comprising:

• a pair of electrodes, wherein each of the electrodes has an electrode face, wherein the faces of the electrodes are in opposing spaced relation to each other to establish a working volume between the opposing faces of the electrodes, and wherein one of the electrode faces has a plurality of holes which communicate with the working volume;
• means for introducing a working gas at or about one atmosphere of pressure and at a determined temperature, humidity and flow rate into the working volume;
• and
• means for exciting the electrodes to generate a uniform, steady state, glow discharge plasma in the working gas at or about one atmosphere of pressure, for treating the surface of the substrate with species of the generated plasma, wherein the exciting means is a tuned, resonant circuit which generates a resonant response having a center frequency of from 1 to 30 MHz.