Portable emission microscope workstation for failure analysis

An apparatus for detecting defects in an integrated circuit, the apparatus comprising:

• a. a housing for containing the integrated circuit, wherein the housing includes an aperture;
• b . a microscope for creating a magnified optical image of the integrated circuit wherein the microscope comprises an objective for viewing the integrated circuit through the aperture;
• c. a flexible boot removably attached to the objective for shielding an optical path between the aperture and the objective from ambient light;
• d. a CCD camera for capturing the magnified optical image of the integrated circuit;
• e. an image processor coupled to the CCD camera for receiving and processing the magnified optical image;
• and
• f. a display coupled to the image processor for receiving and displaying a processed image of the integrated circuit.

An apparatus for detecting defects in an integrated circuit, comprising:

• a. a housing for containing the integrated circuit, wherein the housing includes an aperture;
• b. an objective of a microscope for creating a magnified optical image of the integrated circuit;
• c. a flexible boot coupled to the objective for shielding the aperture and the objective from ambient light, wherein a substantial portion of the microscope is uncovered by the boot and exposed to ambient light;
• d. a CCD camera coupled to the microscope for capturing the magnified optical image of the integrated circuit;
• e. an image processor coupled to the CCD camera for receiving and processing the magnified optical image;
• and
• f. a display coupled to the image processor for receiving and displaying a processed image of the integrated circuit.

A method of detecting photons emitted from defects in an integrated circuit comprising steps of:

• a. shielding the integrated circuit from ambient light with a light-tight enclosure, wherein the enclosure includes an aperture for allowing the photons to exit the enclosure;
• b. aligning an objective of a microscope with the aperture for receiving the photons;
• c. shielding an optical path between the objective and the aperture from ambient light with a boot that is removably attached to the objective;
• d. biasing the integrated circuit;
• and
• e. forming an emission image of the integrated circuit according to an intensity of the photons emitted from the integrated circuit.

A method of detecting photons emitted from defects in an integrated circuit comprising steps of:

• a. shielding the integrated circuit from ambient light with a light-tight enclosure, wherein the enclosure includes a aperture for allowing the photons to exit the enclosure;
• b. aligning an objective of a microscope with the aperture for receiving the photons;
• c. shielding an optical path between the objective and the aperture from external illumination with a boot, wherein a substantial portion of the microscope is uncovered by the boot and exposed to ambient light;
• d. biasing the integrated circuit;
• and
• e. forming an emission image according to an intensity of the photons emitted from the integrated circuit.