Method for linearization of ion currents in a quadrupole mass analyzer
AssigneeLeybold Inficon, Inc.
InventorsDavid H. Holkeboer, Robert E. Ellefson
Life of this patent
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Abstract
A method for linearizing the sensitivity of a quadrupole mass spectrometric system to allow the sensor to more accurately report partial pressures of a gas in high pressure areas in which the reported data is effected by a number of loss mechanisms. According to the invention, correction factors can be applied empirically or software in a quadrupole mass analyzer system can be equipped with correcting software to expand the useful range of the mass spectrometer.
Claims6
A method for correcting a measurement of a partial pressure in a mass spectrometer measuring both a measured partial pressure and a measured total pressure in the millitorr range of a high vacuum, comprising the steps of:
- measuring a total pressure ion current to obtain a measured total pressure ion current;
- determining, based on said measured total pressure ion current, said measured total pressure;
- measuring a partial pressure ion current to obtain a measured partial pressure;
- determining a correction factor based on said measured total pressure ion current;
- and
- correcting, using said correction factor, said measured partial pressure to obtain a corrected partial pressure.
Dependencies are inferred from the claim text.