Method of and apparatus for independently controlling electric parameters of an impedance matching network

A method of matching a load to a power source with a match network having a primary circuit and a secondary circuit, comprising the steps of:

• establishing a resonant condition in the primary circuit;
• measuring at least two parameters of the load;
• calculating a control variable from at least one of the parameters;
• determining whether a first one of the load parameters is equal to a first specified value based on the value of the control variable;
• adjusting a first match variable of the match network to drive the control variable such that the first load parameter is equal to the first specified value;
• determining whether a second one of the load parameters is equal to a second specified value;
• and
• adjusting a second match variable of the match network to drive the match variable such that the second load parameter is equal to the second specified value, wherein the first match variable has a one-to-one correspondence with the first load parameter and the second match variable has a one-to-one correspondence with the second load parameter.

A method of matching a load to a power source with a match network having a primary circuit and a secondary circuit, comprising the steps of:

• measuring at least two parameters of the load;
• transforming the two parameters of the load into first and second nearly orthogonal functions;
• and
• simultaneously and independently adjusting a first match variable of the match network to drive the value of the first orthogonal function to a first specified value, and a second match variable of the match network to drive the value of the second orthogonal function to a second specified value.