Method of fabricating plastic mask for paste printing with an excimer laser
AssigneeRicoh Microelectronics Co., Ltd.
InventorMakoto Kinoshita
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AssigneeRicoh Microelectronics Co., Ltd.
InventorMakoto Kinoshita
Estimating the term…
A method of fabricating a plastic mask for paste printing with a plastic sheet being irradiated with an excimer laser beam for forming at least one penetrating opening container area including at least one through-hole in the plastic sheet is carried out by the steps of bringing a polymer film capable of absorbing at least part of the excimer laser beam into close contact with a back surface of the plastic sheet which is opposite to an excimer laser beam irradiation side thereof which is to be irradiated with the excimer laser beam; forming at least one penetrating opening containing area including at least one through-hole in the plastic sheet by irradiating the excimer laser beam irradiation side thereof with the excimer laser beam; and removing the polymer film from the plastic sheet after the formation of the penetrating opening containing area. By use of a plastic mask fabricated by the above method, a pasta printing is also carried out.
A method of fabricating a plastic mask for paste printing with a plastic sheet being irradiated with an excimer laser beam for forming at least one penetrating opening containing area comprising at least one through-hole in said plastic sheet, comprising the steps of:
Dependencies are inferred from the claim text.