Method of customizing integrated circuits by selective secondary deposition of layer interconnect material
AssigneeClear Logic, Inc.
InventorsAlan H. Huggins, John MacPherson
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Abstract
A method for fabricating custom integrated circuits includes the steps of 1) patterning a photoresist layer on an insulative layer with a standard via precision mask to define all possible vias, and 2) using a targeting energy beam to select the desired via locations, which are then etched and interconnections made, for customization or repair of the integrated circuit. Consequently, the present invention requires no custom mask so that application specific integrated circuits (ASICs) can be produced with lower lead-time and costs when compared to prior methods.
Claims9
A method for customizing or repairing an integrated circuit comprising:
- providing a substrate in which circuit elements have been formed, said circuit elements having a plurality of contact points provided at an upper surface of said substrate;
- depositing an insulative layer overlying the upper surface of said substrate;
- depositing a positive photoresist layer overlying said insulative layer;
- exposing said photoresist layer with a first energy to define possible via locations in the insulative layer for connecting said possible contact points to a patterned interconnect layer, wherein said first energy is less than the clearing energy of said photoresist;
- selectively exposing said photoresist layer with a second energy to define desired via locations, wherein said second energy is less than the clearing energy of said photoresist and wherein the combined energy of said first and second energies is at least equal to said clearing energy;
- and
- developing said photoresist, thereby removing portions of the photoresist layer at said desired via locations, and etching the insulative layer to uncover possible contact points at said desired via locations within said insulative layer.
A method for customizing or repairing an integrated circuit comprising:
- providing a substrate in which circuit elements have been formed, said circuit elements having a plurality of contact points provided at an upper surface of said substrate;
- depositing an insulative layer overlying the upper surface of said substrate;
- depositing a positive photoresist layer overlying said insulative layer;
- exposing said photoresist layer with a first energy to define possible via locations in the insulative layer for connecting said possible contact points to a patterned interconnect layer, wherein said first energy is less than the clearing energy of said photoresist;
- selectively exposing said photoresist layer with a second energy to define desired via locations, wherein said second energy is less than the clearing energy of said photoresist and wherein the combined energy of said first and second energies is at least equal to said clearing energy;
- and
- developing said photoresist, thereby removing portions of the photoresist layer at said desired via locations, and etching the insulative layer to uncover possible contact points at said desired via locations within said insulative layer, wherein said
Dependencies are inferred from the claim text.