Polishing apparatus

An apparatus for polishing a surface of a workpiece, said apparatus comprising:

• a polishing section for polishing the surface of the workpiece while using a liquid supplied to said polishing section from exterior thereof;
• a cleaning section for cleaning the thus polished workpiece while using a cleaning liquid supplied to said cleaning section from exterior thereof;
• an abrasive liquid supply device for supplying abrasive liquid to a polishing surface in said polishing section, said abrasive liquid supply device being supplied with liquid from exterior thereof;
• a temperature adjusting device for adjusting temperature of liquid supplied to at least one of said polishing section, said cleaning section and said abrasive liquid supply device, said temperature adjusting device being supplied with liquid from exterior thereof;
• each of said polishing section, said cleaning section, said abrasive liquid supply device and said temperature adjusting device having therein a respective liquid leakage sensor for detecting therein an occurrence of a liquid leakage;
• a liquid supply stop device for stopping supply of liquid to said polishing section, said cleaning section, said abrasive liquid supply device and said temperature adjusting device;
• and
• a controller operable, in response to detection of a liquid leakage by any of the respective liquid leakage sensors, to operate said liquid supply stop device to stop the supply of liquid respectively to said polishing section, said cleaning section, said abrasive liquid supply device or said temperature adjusting device.

A method of operating a polishing apparatus for polishing a surface of a workpiece, wherein said polishing apparatus comprises a polishing section for polishing the surface of the workpiece while using a liquid supplied to said polishing section from exterior thereof, a cleaning section for cleaning the thus polished workpiece while using a cleaning liquid supplied to said cleaning section from exterior thereof, an abrasive liquid supply device for supplying abrasive liquid to a polishing surface in said polishing section, said abrasive liquid supply device being supplied with liquid from exterior thereof, a temperature adjusting device for adjusting temperature of liquid supplied to at least one of said polishing section, said cleaning section and said abrasive liquid supply device, said temperature adjusting device being supplied with liquid from exterior thereof, each of said polishing section, said cleaning section, said abrasive liquid supply device and said temperature adjusting device having therein a respective liquid leakage sensor for detecting therein an occurrence of a liquid leakage, and a liquid supply stop device for stopping supply of liquid to said polishing section, said cleaning section, said abrasive liquid supply device and said temperature adjusting device, said method comprising:

• upon detection of the occurrence of a liquid leakage in either said polishing section or said abrasive liquid supply device by respective said liquid leakage sensors therein, operating said liquid supply stop device to interrupt the supply of liquid either to said polishing section or to said abrasive liquid supply device wherein said liquid leakage is detected, and stopping polishing of a workpiece in said polishing section;
• and
• upon detection of the occurrence of a liquid leakage in said cleaning section by the respective said liquid leakage sensor therein, operating said liquid supply stop device to interrupt the supply of liquid to said cleaning section, completing polishing of a workpiece being polished in said polishing section at the time of detection of said liquid leakage in said cleaning section, and prohibiting subsequent starting of polishing of a new workpiece in said polishing section.