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US 5,883,387 AGranted
SPM cantilever and a method for manufacturing the same
AssigneeOlympus Optical Co., Ltd.
InventorsKatsuhiro Matsuyama, Michio Takayama
Life of this patent
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Abstract
An SPM cantilever comprises a cantilever portion shaped as a thin plate and extending between a proximal end and a free end, a supporting portion attached to one surface of the cantilever portion on a side of the proximal end, and a probe projecting from the other surface of the cantilever portion on a side of the free end of the cantilever portion the supporting member, and the cantilever portion and the probe are made of different materials.
Claims12
An SPM cantilever comprising:
- a probe portion;
- and
- a cantilever portion having a proximal end portion, a free end portion, a first surface and a second surface,
- the probe portion extending from the first surface of the free end portion,
- the cantilever portion being bent according to an interaction between a sample and the probe portion,
- the probe portion and the cantilever portion being made of materials having different properties,
- the material of the probe portion being a hard material relative to the material of the cantilever portion, and
- wherein said probe portion is made of silicon nitride, and said cantilever portion is made of silicon.
5 more elements
An SPM cantilever comprising:
- a probe Portion;
- and
- a cantilever Portion having a Proximal end portion, a free end portion, a first surface and a second surface,
- the probe portion extending from the first surface of the free end portion,
- the cantilever portion being bent according to an interaction between a sample and the probe portion,
- the probe portion and the cantilever portion being made of materials having different properties,
- the material of the Probe Portion being a hard material relative to the material of the cantilever portion,
- wherein said Probe portion is made of silicon nitride, and said cantilever portion is made of silicon, and
- wherein the silicon nitride of which said probe portion is made includes silicon and nitrogen in a ratio of 3:4.
6 more elements
An SPM cantilever comprising:
- a probe portion;
- and
- a cantilever portion having a proximal end portion, a free end portion, a first surface and a second surface,
- the probe portion extending from the first surface of the free end portion,
- the cantilever portion being bent according to an interaction between a sample and the probe portion,
- the probe portion and the cantilever portion being made of materials having different properties,
- the material of the probe portion being a hard material relative to the material of the cantilever portion, and
- wherein said probe portion is made of silicon carbide, and said cantilever portion is made of silicon.
5 more elements
An SPM cantilever comprising:
- a probe portion;
- and
- a cantilever portion having a proximal end portion, a free end portion, a first surface and a second surface,
- the probe portion extending from the first surface of the free end portion,
- the cantilever portion being bent according to an interaction between a sample and the probe portion,
- the probe portion and the cantilever Portion being made of materials having different properties,
- the material of the probe portion being a hard material relative to the material of the cantilever portion, and
- wherein said probe portion is made of silicon nitride including silicon and nitrogen in a ratio of 3:4, and said cantilever portion is made of silicon nitride including a larger amount of silicon relative to the probe portion.
5 more elements
An SPM cantilever comprising:
- a probe portion;
- and
- a cantilever portion having a proximal end portion, a free end portion, a first surface and a second surface,
- the probe portion extending from the first surface of the free end portion,
- the cantilever portion being bent according to an interaction between a sample and the probe portion,
- the probe portion and the cantilever portion being made of materials having different properties,
- the material of the probe portion being a hard material relative to the material of the cantilever portion, and
- further comprising an optical shading portion attached to a circumferential surface of the probe portion and made of material having a lower refraction index than the probe portion, and
- wherein said probe portion is supported on the cantilever portion by the optical shading portion.
6 more elements
Dependencies are inferred from the claim text.