Multibeam scanning method and apparatus with positional adjustment features

A multibeam scanning apparatus for scanning a target with a plurality of laser beams emitted from a plurality of separate laser beam generation sources, comprising:

• a first deflector provided between the plurality of laser beam generation sources and the target, for commonly deflecting the plurality of laser beams emitted from the plurality of laser beam generation sources to scan the target;
• a second deflector provided between the first deflector and each of the plurality of laser beam generation sources, for allowing a radiating position of each of the plurality of laser beams to move on the target;
• a lens provided between the first deflector and the target, for allowing the plurality of laser beams to commonly pass therethrough;
• a sensor located at a downstream position of the lens and optically in conjugation with the target, for commonly sensing radiating positions of the plurality of laser beams on the target;
• a reflection mirror provided between the lens and the sensor, for commonly guiding the plurality of laser beams from the lens to the sensor;
• and
• a controller for obtaining a deviation between the radiating position of each of the laser beams and a predetermined position based on a sensing result of the sensor, and controlling the second deflector in order to set the radiating position in the predetermined position.

A multibeam scanning method of scanning a target with a plurality of laser beams emitted from a plurality of separate laser beam generation sources, comprising the steps of:

• deflecting the plurality of laser beams emitted from the plurality of separate laser beam generation sources by a deflection member to scan a target;
• sensing the radiating position of each of the plurality of laser beams on the target in a downstream position of the deflection member and optically in conjugation with the target, in which a first beam-receiving element for sensing a reference position indicative of start of scanning is located upstream in the scanning direction of each of the plurality of laser beams, and a plurality of second beam-receiving elements for sensing a radiating position of each of the plurality of laser beams in a direction perpendicular to the scanning direction is located downstream in the scanning direction;
• and
• obtaining a deviation between the radiating position of each of the plurality of laser beams and a predetermined position based on a result of the sensing step, and controlling optical paths of the plurality of laser beams between the laser beam generation sources and the deflection member in order to set the radiating position to the predetermined position.

A multibeam scanning apparatus for scanning a target with a plurality of laser beams emitted from a plurality of separate laser beam generation sources, comprising:

• a first deflector provided between the plurality of laser beam generation sources and the target, for deflecting the plurality of laser beams emitted from the plurality of laser beam generation sources to scan the target;
• a second deflector provided between the first deflector and each of the plurality of laser beam generation sources, for allowing a radiating position of each of the plurality of laser beams to move on the target;
• a sensor located at a downstream position of the first deflector and optically in conjugation with the target, for sensing the radiating position of each of the plurality of laser beams on the target, said sensor including a first beam-receiving element, located upstream in the scanning direction of each of the plurality of laser beams, for sensing a reference position indicative of start of scanning, and a plurality of second beam-receiving elements, located downstream in the scanning direction, for sensing a radiating position of each of the plurality of laser beams in a direction perpendicular to the scanning direction;
• and
• a controller for obtaining a deviation between the radiating position of each of the laser beams and a predetermined position based on a sensing result of the sensor, and controlling the second deflector in order to set the radiating position in the predetermined position.

A multibeam scanning method of scanning a target with a plurality of laser beams emitted from a plurality of separate laser beam generation sources, comprising the steps of:

• commonly deflecting the plurality of laser beams emitted from the plurality of separate laser beam generation sources by a deflection member to scan a target;
• allowing the plurality of laser beams after being deflected to commonly pass through a lens provided between the deflection member and the target;
• commonly sensing radiating positions of the plurality of laser beams on the target by a sensor at a downstream position of the lens and optically in conjugation with the target;
• commonly guiding the plurality of laser beams from the lens to the sensor by a reflection mirror provided between the lens and the sensor;
• and
• obtaining a deviation between the radiating position of each of the plurality of laser beams and a predetermined position based on a result of the sensing step, and controlling optical paths of the plurality of laser beams between the laser beam generation sources and the deflection member in order to set the radiating position to the predetermined position.