Modular piezo valve arrangement

A modular piezo valve arrangement, comprising:

• a valve element including a housing with a first substantially planar surface and a second substantially planar surface, a pressurized gas channel extending from said first substantially planar surface to said second substantially planar surface, a gas discharge channel defined by said housing extending from said first substantially planar surface to said second substantially planar surface, a metering channel formed in said housing and in fluid connection with each of said pressurized gas channel and said gas discharge channel, a sealing surface formed in said housing and defining an interface between said metering channel and said gas discharge channel, a metering element setting a gas volume rate of flow from said pressurized gas channel via said metering element, said metering channel and to said gas discharge channel, and a piezo vibrating element held freely movable in said housing said piezo vibrating element having one side which is bonded gas-tightly in said housing and an opposite side which either rests on said sealing surface or forms a defined opening between said piezo vibrating element and said sealing surface in the electrically nonenergized state of rest;
• a connection plate having a connection plate substantially planar surface with a pressurized gas connection and with a gas discharge connection, said connection plate substantially planar surface being disposed adjacent to said first substantially planar surface to define a sealed interface with said pressurized gas connection in fluid communication with said pressurized gas channel and said gas discharge connection in fluid communication with said gas discharge channel;
• a closing plate having a closing plate substantially planar surface, said closing plate substantially planar surface being disposed adjacent to said second substantially planar surface to define a sealed interface.

A modular piezo valve arrangement, comprising:

• a valve element including a housing with a first substantially planar surface and a second substantially planar surface, said housing having connection openings a pressurized gas channel defined by said housing extending from said first substantially planar surface to said second substantially planar surface, a gas discharge channel defined by said housing extending from said first substantially planar surface to said second substantially planar surface, a metering channel formed in said housing and in fluid connection with each of said pressurized gas channel and said gas discharge channel, a sealing surface formed in said housing and defining an interface between said metering channel and said gas discharge channel, a metering element setting a gas volume rate of flow from said pressurized gas channel via said metering element, said metering channel and to said gas discharge channel, and a piezo vibrating element held freely movable in said housing said piezo vibrating element having one side which is bonded gas-tightly in said housing and an opposite side which either directly rests on said sealing surface or forms a defined opening between said piezo vibrating element and said sealing surface in the electrically nonenergized state of rest;
• another valve element including a another valve housing with a first another valve substantially planar surface and a second another valve substantially planar surface, said another valve housing having connection openings, an another valve pressurized gas channel extending from said first another valve substantially planar surface to said second another valve substantially planar surface, an another valve gas discharge channel defined by said another valve housing extending from said first another valve substantially planar surface to said second another valve substantially planar surface, an another valve metering channel formed in said another valve housing and in fluid connection with each of said another valve pressurized gas channel and said another gas discharge channel, an another valve sealing surface formed in said another valve housing and defining an interface between said another valve metering channel and said another valve gas discharge channel, an another valve metering element setting a gas volume rate of flow from said another valve pressurized gas channel via said another valve metering element, said another metering channel and to said another valve gas discharge channel, and an another valve piezo vibrating element held freely movable in said another valve housing said another valve piezo vibrating element having one side which is bonded gas-tightly in said another valve housing and an opposite side which either directly rests on said another valve sealing surface or forms a defined opening between said another valve piezo vibrating element and said another valve sealing surface in the electrically nonenergized state of rest;
• a connection plate having a connection plate substantially planar surface with a pressurized gas connection and with a gas discharge connection, said connection plate substantially planar surface being disposed adjacent to said first substantially planar surface to define a sealed interface with said pressurized gas connection in fluid communication with said pressurized gas channel and said gas discharge connection in fluid communication with said gas discharge channel;
• a closing plate having a closing plate substantially planar surface, said closing plate substantially planar surface being disposed adjacent said second another valve substantially planar surface to define a sealed interface between said another valve and said closing plate, said valve second substantially planar surface being positioned adjacent to said first another valve substantially planar surface.