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US 5,879,424 AGranted
Optical micro-machining method of glass
AssigneeAgency of Industrial Science and Technology
InventorsJunji Nishii, Hiroshi Yamanaka
Life of this patent
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Abstract
An optical micro-machining method of glass characterized in that after light is applied to glass including SiO.sub.2 and 30-70 mol % GeO.sub.2, the irradiated area is removed by etching.
Claims24
A method of optically micro-machining a glass, comprising
- providing a glass comprising SiO.sub.2 and 30 to 70 mol % GeO.sub.2,
- applying light to an area on a surface of the glass to produce a light irradiated area, and
- etching the glass in the light irradiated area.
Dependencies are inferred from the claim text.