End point polishing apparatus and polishing method
AssigneeFujitsu Limited
InventorTadayuki Kojima
Life of this patent
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Abstract
A polishing apparatus of the present invention comprises an amplifier for amplifying a first signal being input from the vibration detecting device attached on a second surface plate to then output a second signal, a gain indicator for determining unsuitableness of a gain of the amplifier based on a magnitude of the second signal output from the amplifier and then indicating correction of said gain, a gain adjuster for adjusting the gain of the amplifier based on a gain correction signal output from the gain indicator, a polishing end-point analyzing portion for determining an end-point of polishing based on change in the second signal, and a control portion for terminating drive of the first surface plate based on a polishing end-point signal being output from the polishing end-point analyzing portion.
Claims15
A polishing apparatus comprising:
- a first surface plate on which an abrasive cloth is placed;
- a first driving mechanism for rotating said first surface plate;
- a second surface plate for supporting a object to be polished;
- a second driving mechanism for rotating said second surface plate over said abrasive cloth;
- a vibration detecting device attached on said second surface plate;
- an amplifier for amplifying a first signal being input from said vibration detecting device to output a second signal;
- a gain indicator for determining unsuitableness of gain of said amplifier based on a magnitude of said second signal output from said amplifier and then indicating correction of said gain;
- a gain adjuster for adjusting gain of said amplifier based on a gain correction signal output from said gain indicator;
- a polishing end-point analyzing portion for determining an end-point of polishing based on change in said second signal;
- and
- a control portion for terminating drive of said first surface plate by virtue of said first driving mechanism based on a polishing end-point signal output from said polishing end-point analyzing portion and also terminating drive of said second surface plate by virtue of said second driving mechanism.
A polishing method comprising the steps of:
- starting polishing of a object to be polished by moving said object to be polished being supported by a second surface plate on an abrasive cloth being mounted on a first surface plate;
- amplifying by an amplifier a first output signal of polishing vibration which is detected by a vibration detecting device being attached to said second surface plate;
- determining suitableness of gain of said amplifier based on a magnitude of said second signal output from said amplifier, and modifying a magnitude of said gain of said amplifier if said gain is not set to a suitable magnitude;
- and
- determining an end-point of polishing based on change in said second signal being output from said amplifier, and terminating polishing by stopping movement of said first surface plate.
Dependencies are inferred from the claim text.