Method and apparatus for aligning and tensioning a pad/belt used in linear planarization for chemical mechanical polishing
AssigneeLam Research Corporation
InventorsAnil K. Pant, Douglas W. Young, Joseph R. Breivogel, Konstantin Volodarski, Leon Volfovski
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Abstract
The present invention describes an apparatus and method for aligning a pad/belt on a roller for use in chemical mechanical polishing using linear planarization. The present invention comprises an alignment sensor that senses the alignment of the pad/belt. The present invention additionally comprises a tensioner that tensions the pad/belt on the roller. And, a controller that controls the alignment of the pad/belt on the roller by controlling the tensioner.
Claims26
An apparatus for aligning a pad/belt on a roller of a linear polisher used in chemical mechanical polishing of a semiconductor, comprising:
- a linear polisher with the pad/belt linearly carried by the roller;
- an alignment sensor, said alignment sensor senses the alignment of the pad/belt on the roller;
- a tensioner, said tensioner tensions the pad/belt;
- and
- a controller, said controller controls the alignment of the pad/belt on the roller by controlling said tensioner.
A system for aligning a pad/belt on a roller of a linear polisher used in chemical mechanical polishing of a semiconductor, comprising:
- a linear polisher with the pad/belt linearly carried by the roller;
- an alignment sensor, said alignment sensor senses the alignment of the pad/belt on the roller;
- tensioning means for tensioning the pad/belt;
- and
- controller means for controlling the alignment of the pad/belt on the roller by controlling said tensioning means.
A method for aligning a pad/belt on a roller of a linear polisher used in chemical mechanical polishing of a semiconductor, comprising the following steps:
- rotating the pad/belt about the roller of a linear polisher;
- sensing the alignment of the pad/belt on the roller;
- tensioning the pad/belt;
- and
- aligning the pad/belt on the roller by controlling said step of tensioning the pad/belt.
Dependencies are inferred from the claim text.