Non-contaminating pressure transducer module
AssigneeNT International, Inc.
InventorsGerald R. Cucci, Diane L. Englund
Life of this patent
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Abstract
A non-contaminating pressure transducer module having an isolation member is disclosed. The isolation member isolates a pressure sensor within the transducer module from exposure to ultra high purity fluids flowing through a conduit in the module without significantly affecting the accuracy of the pressure measurement. The transducer module may be positioned within a fluid flow circuit carrying corrosive materials, wherein the pressure transducer module produces a control signal proportional to either a gauge pressure or an absolute pressure of the fluid flow circuit. The pressure transducer module of the present invention also avoids the introduction of particulate, unwanted ions, or vapors into the flow circuit.
Claims45
A chemically inert pressure transducer module adapted to be connected within a chemically corrosive ultra high purity fluid flow circuit, comprising:
- (a) a chemically inert housing having a bore extending through at least a portion of said housing, wherein an inlet end of said bore is connected to the fluid flow circuit, said housing further having a cavity formed therein and extending from an outer surface of said housing toward the bore of said housing;
- (b) a non-fluid conducting pressure sensor positioned within said cavity adjacent said bore for sensing a pressure within the fluid flow circuit;
- (c) a chemically inert isolation member separating said cavity and said bore, said isolation member having first and second opposed major surfaces, said first major surface being exposed to fluid flowing in the bore, said second major surface engaging and adjoining the non-fluid conducting pressure sensor, thereby isolating the pressure sensor from fluid communication with the bore;
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- (d) means for constraining the pressure sensor against the isolation member in a fixed position within the cavity of the housing.
A chemically inert pressure transducer module adapted to be connected within a chemically corrosive ultra high purity fluid flow circuit, comprising:
- (a) a chemically inert housing having a bore extending through at least a portion of said housing, wherein an inlet end of said bore is connected to the fluid flow circuit, said housing further having a cavity formed therein and extending from an outer surface of said housing into the bore of said housing;
- (b) a non-fluid conducting pressure sensor positioned within said cavity adjacent said bore for sensing a pressure within the fluid flow circuit;
- (c) a chemically inert isolation member separating said cavity and said bore, said isolation member having first and second opposed major surfaces, said first major surface being exposed to fluid flowing in the bore, said second major surface being adjacent to and adjoining the non-fluid conducting pressure sensor, thereby isolating the pressure sensor from fluid communication with the bore;
- (d) means for constraining the isolation member against the non-fluid conducting pressure sensor in a fixed position within the cavity of the housing;
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- (e) an electronic circuit contained within the cavity of the housing and coupled to the non-fluid conducting pressure sensor, whereby the electronic circuit produces an electrical signal proportional to the pressure within the bore.
A chemically inert pressure transducer module adapted to be connected in-line within a chemically corrosive ultra high purity fluid flow circuit, comprising:
- (a) a chemically inert housing having a bore extending through at least a portion of said housing, wherein an inlet end of said bore is connected to the fluid flow circuit, said housing further having a cavity formed therein and extending from an outer surface of said housing toward the bore of said housing;
- (b) a non-fluid conducting pressure sensor positioned within said cavity adjacent said bore for sensing a pressure within the fluid flow circuit, said pressure sensor having an isolation member engaged to a lower planar surface of the pressure sensor;
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- (c) means for sealably constraining the pressure sensor and isolation member against an opening formed in the housing between the cavity and bore.
A chemically inert pressure transducer module adapted to be connected within a chemically corrosive ultra high purity fluid flow circuit, comprising:
- (a) a housing having a bore extending through at least a portion of said housing, wherein an inlet end of said bore is connected to a fluid flow circuit, said housing further having a cavity formed therein and extending from an outer surface of said housing toward the bore of said housing;
- (b) a non-fluid conducting pressure sensor positioned within said cavity adjacent said bore for sensing a pressure within the fluid flow circuit;
- (c) an isolation member separating said cavity and said bore, said isolation member having first and second opposed major surfaces, said first major surface being exposed to fluid flowing in the bore, said second major surface engaging and adjoining the pressure sensor, thereby isolating the pressure sensor from fluid communication with the bore;
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- (d) means for positioning at least a portion of said pressure sensor and said isolation member in a fixed position within the cavity of the housing.
Dependencies are inferred from the claim text.