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US 5,868,608 AGranted
Subsonic to supersonic and ultrasonic conditioning of a polishing pad in a chemical mechanical polishing apparatus
AssigneeLSI Logic Corporation
InventorsDerryl D.J. Allman, John W. Gregory
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Abstract
The present invention provides a method and apparatus for conditioning a polishing pad in which slurry is directed under pressure at the polishing pad. Additionally, energy (i.e., ultrasonic energy) may be added to the slurry as it is directed towards the polishing pad, wherein embedded material in the polishing pad is removed or dislodged.
Claims13
A chemical mechanical polishing system, comprising:
- a polishing pad;
- and
- a slurry dispenser including:
- an input adapted for connection to a slurry source;
- at least one output, wherein slurry is directed towards the polishing pad through the at least one output;
- and
- an energy source for supplying energy to the slurry prior to the slurry being sent through the at least one output, wherein the energy source is an ultrasonic energy source.
4 more elements
A chemical mechanical polishing system, comprising:
- a polishing pad;
- and
- a slurry dispenser including:
- a member having a cavity with an input adapted for connection to a slurry source and at least one output, wherein slurry is directed towards the polishing pad through the at least one output;
- and
- an energy source for supplying energy to the slurry prior to the slurry being sent through the at least one output, wherein the energy source is located within the member, wherein the slurry is provided by the slurry source to the input of the slurry dispenser at a pressure such that the slurry exits the at least one output with at least a subsonic velocity, and wherein the energy source supplies energy to the slurry being provided to the input of the slurry dispenser at a pressure prior to the slurry being sent through the at least one output with at least a subsonic velocity.
3 more elements
A chemical mechanical polishing system, comprising:
- a polishing pad;
- and
- a slurry dispenser including:
- an input adapted for connection to a slurry source;
- at least one output, wherein slurry is directed towards the polishing pad through the at least one output;
- an energy source for supplying energy to the slurry prior to the slurry being sent through the at least one output;
- an elongate member having a cavity, wherein the cavity is in communication with the input and the at least one output;
- and
- at least one ultrasonic transducer located within the cavity of the elongate member, wherein the at least one ultrasonic transducer is located proximate to the at least one output, such that ultrasonic energy is imparted to slurry.
6 more elements
Dependencies are inferred from the claim text.