Back to results
US 5,866,724 AGranted
Positive resist composition and photosensitizers
AssigneeSumitomo Chemical Company, Limited
InventorsKoji Ichikawa, Haruyoshi Osaki, Hiroki Inoue
Life of this patent
Estimating the term…
Loading patent…
Loading patent…
AssigneeSumitomo Chemical Company, Limited
InventorsKoji Ichikawa, Haruyoshi Osaki, Hiroki Inoue
Estimating the term…
A positive photoresist compositions comprising, as a photosensitizer, a quinonediazide sulfonic acid ester of a phenol compound represented by the following formula (I): ##STR1## wherein Q.sup.1, Q.sup.2, Q.sup.3, Q.sup.4, Q.sup.5, Q.sup.6, Q.sup.7, Q.sup.8, Q.sup.9 and Q.sup.10 independently represent hydrogen, alkyl having 1-6 carbon atoms or phenyl, or Q.sup.1 and Q.sup.2, Q.sup.3 and Q.sup.4, Q.sup.5 and Q.sup.6, Q.sup.7 and Q.sup.8, or Q.sup.9 and Q.sup.10 may form a cycloalkane ring having 6 or less carbon atoms together with a carbon atoms to which they are connected, R.sup.1, R.sup.2, R.sup.3, R.sup.4, R.sup.5, R.sup.6, R.sup.7, R.sup.8, R.sup.9, R.sup.10, R.sup.11, R.sup.12, R.sup.13, R.sup.14, R.sup.15 and R.sup.16 independently represent hydrogen, hydroxyl, alkyl having 1-6 carbon atoms or phenyl; and m and n independently represent a number of 0 or 1; and an alkali soluble resin; and a quinonediazide sulfonic acid ester of a phenol compound of formula (I).
A phenol compound represented by the following formula VII. ##STR18## wherein R.sup.28, R.sup.29, R.sup.30, R.sup.31 and R.sup.32 independently represent hydrogen, 1,2-naphthoquinonediazide-4-sulfonyl or 1,2-naphthoquinonediazide-5-sulfonyl.
A phenol compound represented by the following formula X. ##STR19## wherein R.sup.33, R.sup.34, R.sup.35, R.sup.36, R.sup.37 and R.sup.38 independently represent hydrogen, 1,2-naphthoquinonediazide-4-sulfonyl or 1,2-naphthoquinonediazide-5-sulfonyl.
A phenol compound represented by the following formula XI. ##STR20## wherein R.sup.39, R.sup.40, R.sup.41, R.sup.42 and R.sup.43 independently represent hydrogen, 1,2-naphthoquinonediazide-4-sulfonyl or 1,2-naphthoquinonediazide-5-sulfonyl.
A phenol compound represented by the following formula XIII:
A phenol compound represented by the following formula XIV:
2,6-Bis(4-hydroxy-3-hydroxymethyl-2,5-dimethylbenzyl)-4-methylphenol.
Dependencies are inferred from the claim text.