Method of using an interface layer for stacked lamination sizing and sintering
AssigneeInternational Business Machines Corporation
InventorsJon A. Casey, Michael A. Cohn, John J. Garant, Abubaker S. Shagan, Candace A. Sullivan, Robert J. Sullivan, Andrew H. Vogel
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Abstract
A process for making multiple microelectronic ceramic substrates uses an interface layer between stacked layers of green sheets that are laminated with the interface layer, then fired to produce the ceramic substrates. The interface layer acts to protect the substrates, and to hold them together before firing, then thermally degrades at a desired point in the firing cycle to separate the individual substrates. The invention also includes the ceramic substrates produced by the method.
Claims15
A process for making multiple microelectronic ceramic substrates comprising the steps of:
- stacking a first plurality of green sheets;
- stacking a second plurality of green sheets;
- positioning a thermally degradable interface layer between the first and second pluralities of green sheets;
- laminating the first and second pluralities of green sheets and the interface layer to form a laminate;
- and
- firing the laminate to degrade the interface layer and separate the first and second pluralities of green sheets into individual ceramic substrates.
A process for making multiple microelectronic ceramic substrates comprising the steps of:
- stacking a first plurality of green sheets;
- stacking a second plurality of green sheets;
- positioning a thermally degradable interface layer formed of a polymer and an inorganic material between the first and second pluralities of green sheets;
- laminating the first and second pluralities of green sheets and the interface layer under heat in excess of 35.degree. C. and pressure in excess of 3 megapascals to form a laminate;
- cutting the laminate into individual pieces;
- and
- firing the pieces in a reducing atmosphere to degrade the interface layer and sinter the pieces to form individual ceramic substrates.
Dependencies are inferred from the claim text.