Semiconductor device on semiconductor wafer having simple wirings for test and capable of being tested in a short time
AssigneeNEC Corporation
InventorYouji Terauchi
Life of this patent
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Abstract
In a semiconductor device formed on a semiconductor wafer, writing unit writes a result signal into an unvolatile memory. A testing unit tests whether or not an execution unit of the semiconductor device executes a predetermined function correctly and produces the result signal. The result signal is used to diagnose the semiconductor devise itself. The execution unit may be included in the unvolatile memory.
Claims20
A semiconductor device formed on a semiconductor wafer for executing a predetermined function, said semiconductor device comprising:
- an execution unit for executing said predetermined function;
- testing means for testing whether or not said execution unit executes said predetermined function correctly to produce a result signal representative of a result of the test;
- unvolatile memory means for memorizing said result signal, and
- writing means for writing said result signal into said unvolatile memory means to memorize said result signal in said unvolatile memory means.
A semiconductor wafer having a plurality of device areas each of which is used for forming a semiconductor device executing a predetermined function, at least one of said device areas comprising:
- an execution unit for executing said predetermined function;
- testing means for testing whether or not said execution unit executes said predetermined function correctly to produce a result signal representative of a result of the test;
- unvolatile memory means for memorizing said result signal;
- and
- writing means for writing said result signal into said unvolatile memory means to memorize said result signal in said unvolatile memory means.
A testing instrument for use in supplying a source voltage from a external tester to a plurality of first connecting pads connected to semiconductor devices and formed on a semiconductor wafer together with said semiconductor devices, said testing instrument comprising;
- a plurality of first probes for contacting with said first connecting pads to supply said source voltage to said first connecting pads;
- and
- a plurality of first resistors each of which is connected to each of said first probes to supply said source voltage from said external tester to each of said first probes.
A method of testing a semiconductor device, said semiconductor device having testing means and unvolatile memory means, said method comprising the steps of:
- supplying a source voltage to said testing means to drive said testing means;
- testing whether or not the semiconductor device is acceptable to produce a result signal representative of a result of the test;
- writing the result signal from said testing means into said unvolatile memory means to memorize the result signal in said unvolatile memory means;
- and
- reading the result signal out of the semiconductor device to diagnose the semiconductor device itself.
Dependencies are inferred from the claim text.