Array of thin film actuated mirrors having an improved optical efficiency and an increased performance

Abstract

An array of thin film actuated mirrors for use in an optical projection system is disclosed. The array includes: a substrate including an array of connecting terminals; an array of actuating structures, each of the actuating structures being provided with 4P+1 number of actuating parts and a light reflecting part, and further including a plurality of dividing slots, wherein odd numbered actuating parts deform in response to an electrical signal, and even numbered actuating parts tilt while remaining planar; and an array of pairs of supporting members, each of the supporting members in each pair being, respectively, located below the first and the (4P+1)th actuating parts in each of the actuating structures, thereby cantilevering the corresponding actuating structure in place. In the inventive array, the light reflecting part in each of the actuating structures, which is connected to the (2P+1)th actuating part, tilts at a larger angle, increasing the tilting efficiency of the array. Furthermore, when the electrical signal is applied to each of the actuating structures, the light reflecting part in each of the actuating structures tilts while remaining planar, which, in turn, increases the optical efficiency of the array.

Dependencies are inferred from the claim text.