Particle monitoring instrument

A particle monitoring instrument comprising:

• means for introducing a laser light into a processing reactor;
• means for measuring a scattered light by a particle;
• means for displaying a motion of said particle as a locus of said scattered light, by increasing a pulse oscillation frequency of said laser light source, when an intensity of a signal from a light detector to measure said scattered light exceeds a predetermined value;
• and
• means for displaying a straight line connecting between start and terminal points of said locus on said locus, estimating an origin of said particle by extending said straight line beyond said start point, estimating a destination point of said particle by extending said straight line beyond said terminal point, and estimating a mass of said particle by dividing a length obtained by projecting said straight line in a vertical direction by an exposure time of said scattered light.

A particle monitoring instrument comprising:

• means for introducing a laser light into a processing reactor;
• means for measuring a scattered light by a particle;
• means for displaying a motion of said particle as a locus of said scattered light by prolonging a pulse width of said laser light, when an intensity of a signal from a light detector to measure said scattering light exceeds a predetermined value;
• and
• means for displaying a straight line connecting between start and terminal points of said locus on said locus, estimating an origin of said particle by extending said straight line beyond said start point, estimating a destination point of said particle by extending said straight line beyond said terminal point, and estimating a mass of said particle by dividing a length obtained by projecting said straight line in a vertical direction by an exposure time of said scattered light.