System for performing contact angle measurements of a substrate
AssigneeAST GmbH
InventorsDavid M. Hudson, Richard A. Loder, Wen-Chu Tseng, Yueh-Ju Lee
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AssigneeAST GmbH
InventorsDavid M. Hudson, Richard A. Loder, Wen-Chu Tseng, Yueh-Ju Lee
Estimating the term…
A system is provided for positioning a substrate having a surface required to be characterized with a contact angle measurement. The system includes a stage which supports the substrate and a dispenser assembly having a dispensing tip through which a liquid droplet having a preselected volume is dispensed onto the surface of the substrate. A first actuating mechanism moves the stage in response to first actuation signals and a second actuating mechanism which changes the vertical spacing between the dispensing tip and the surface of the substrate and dispenses the liquid droplet from the dispenser assembly in response to second actuation signals. A controller is connected to the actuating mechanisms and delivers the first and second actuation signals to the first and second actuating mechanisms, respectively, so as to place the liquid droplet at a predetermined location on the surface of the substrate for performing the contact angle measurement.
A system for positioning a substrate having a surface required to be characterized with a contact angle measurement, the system comprising:
Dependencies are inferred from the claim text.