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US 5,861,705 AGranted
Tuning-fork vibratory gyro and sensor system using the same
AssigneeFujitsu Limited
InventorsNoboru Wakatsuki, Masaaki Ono, Sumio Yamada, Kazutugu Kikuchi, Motoi Yamauchi
Life of this patent
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Abstract
A vibratory gyro including a tuning-fork vibrator having a piezoelectric member and a supporting member supporting the tuning-fork vibrator. The tuning-fork vibrator has a driving-side vibration mode and a detection-side vibration mode. The tuning-fork vibrator resonates in the driving-side vibration mode, and the tuning-fork vibrator and the supporting member resonate as a whole in the detection-side vibration mode.
Claims28
A vibratory gyro comprising:
- a tuning-fork vibrator having a piezoelectric member;
- and
- a supporting member supporting the tuning-fork vibrator,
- said tuning-fork vibrator having a driving-side vibration mode and a detection-side vibration mode different from said driving-side vibration mode,
- wherein said tuning-fork vibrator comprises:
- first and second arms;
- detection electrodes provided only on the first arm;
- driving electrodes provided only on the second arm;
- and
- a ground electrode provided on the second arm such that the driving electrodes are in a floating state with respect to the ground electrode,
- said tuning-fork vibrator including a base portion integrally formed with the first and second arms,
- said tuning-fork vibrator resonating in the driving-side vibration mode, and both said tuning-fork vibrator and said supporting member resonating together as a whole in the detection-side vibration mode, and
- at least one of the first and second arms satisfying a predetermined dimensional condition such that the driving-side vibration mode has a Q value which is constant in a stable frequency range.
10 more elements
A sensor system comprising:
- a vibratory gyro;
- a driving circuit for driving the vibratory gyro;
- and
- a detector circuit for detecting an output signal output from the vibratory gyro,
- said vibratory gyro comprising:
- a tuning-fork vibrator having first and second arms, detection electrodes provided only on the first arm, driving electrodes provided only on the second arm, a piezoelectric member, and a ground electrode provided in the second arm such that the driving electrodes are in a floating state with respect to the ground electrode;
- and
- a supporting member supporting the tuning-fork vibrator,
- said tuning-fork vibrator including a base portion integrally formed with the first and second arms,
- said tuning-fork vibrator having a driving-side vibration mode and a detection-side vibration mode different from said driving side vibration mode,
- said tuning-fork vibrator resonating in the driving-side vibration mode, and both said tuning-fork vibrator and said supporting member resonating together as a unit in the detectionside vibration mode, and
- at least one of the first and second arms satisfying a predetermined dimensional condition such that the driving-side vibration mode has a Q value which is constant in a stable frequency range.
9 more elements
Dependencies are inferred from the claim text.