Back to results
US 5,861,672 AGranted
Nonlinear resistance element, manufacturing fabrication method thereof, and liquid crystal display device
AssigneeSeiko Epson Corporation
InventorsKenichi Takahara, Takashi Inami, Takashi Inoue
Life of this patent
Estimating the term…
Abstract
A nonlinear resistance element of this invention comprises a first conductive layer, an insulating layer, and a second conductive layer stacked in sequence on a substrate, wherein: the first conductive layer is a metal film whose main component is a metal to which is added a chemical element having a valence 1 or 2 greater than that of the main component metal, in a concentration of 0.2% to 6 atom %, and the insulating layer is an anodized layer of the first conductive layer. This nonlinear resistance element is particularly suitable for use as a switching element for an active matrix type of liquid crystal display device.
Claims37
A nonlinear resistance element comprising a first conductive layer, an insulating layer, and a second conductive layer stacked in sequence on a substrate, wherein:
- said first conductive layer is a single-layer metal film whose main component is a metal to which is added a chemical element having a valence 1 or 2 greater than that of said metal, in the concentration of 0.2 to 6 atom %, and
- said insulating layer is an anodized layer of said first conductive layer.
A nonlinear resistance element comprising a first conductive layer, an insulating layer, and a second conductive layer stacked in sequence on a substrate, wherein:
- said first conductive layer is a single-layer metal film whose main component is a metal to which is added 0.8 to 6 atom % tungsten,
- said insulating layer is an anodized layer of said first conductive layer,
- said second conductive layer is at least one of a chromium film and a transparent conductive film, and
- a current density J of the current flowing through said element can be approximated by Equation 1 below, provided an activation energy Ea in said Equation 1 is no more than 0.534 eV:
- J=A exp (-Ea/kT) Equation 1
- where:
- A is a constant,
- k is Boltzmann's constant, and
- T is absolute temperature.
6 more elements
A nonlinear resistance element comprising a first conductive layer, an insulating layer, and a second conductive layer stacked in sequence on a substrate, wherein:
- said first conductive layer is a single-layer metal film whose main component is a metal to which is added 0.2 to 6 atom % tungsten,
- said insulating layer is an anodized layer of said first conductive layer,
- said second conductive layer is at least one of a chromium film and a transparent conductive film, and
- if a current density in the element is J.sub.2 when a bias voltage of 10 V is applied after a current is injected for 10 seconds at a current density of 1 A/cm.sup.2, and J.sub.1, when a bias voltage of 10 V is applied after no current is injected, the following Equation 2 is approximately satisfied, where the constants B and n in said Equation 2 satisfy the relationships .vertline.B.vertline..ltoreq.0.2 and n<0:
- log (J.sub.2 /J.sub.1)=B.times.t.sup.1/n Equation 2
- where t is the elapsed time in seconds since the bias voltage was applied.
3 more elements
A nonlinear resistance element comprising a first conductive layer, an insulating layer, and a second conductive layer stacked in sequence on a substrate, wherein:
- said first conductive layer is a single-layer metal film whose main component is a metal to which is added 0.3 to 6 atom % tungsten,
- said insulating layer is an anodized layer of said first conductive layer,
- said second conductive layer is at least one of a chromium film and a transparent conductive film, and
- the following Equation 3 is approximately satisfied when a voltage within a predetermined range is applied to said element, provided the coefficient S in said Equation 3 is no more than 3.times.10.sup.-3 :
- log (J/J.sub.0)=S.times.t.sup.1/m Equation 3
- where:
- t is the elapsed time in seconds since the drive was started,
- J is the current density (A/cm.sup.2) at elapsed time t,
- Jo is the current density (A/cm.sup.2) when the elapsed time t is 1 second, and
- m.gtoreq.1.
7 more elements
A nonlinear resistance element comprising a first conductive layer, an insulating layer, and a second conductive layer stacked in sequence on a substrate, wherein:
- said first conductive layer is a single-layer metal film whose main component is a metal, to which is added 0.2 to 6 atom % tungsten,
- said insulating layer is an anodized layer of said first conductive layer,
- said second conductive layer is at least one of a chromium film and a transparent conductive film, and
- the following Equation 3 is approximately satisfied when a voltage within a predetermined range is applied to said element:
- log (J/J.sub.0)=S.times.t.sup.1/m Equation 3
- where:
- t is the elapsed time (in seconds) since the drive was started,
- J is the current density (A/cm.sup.2) at elapsed time t, and
- J.sub.0 is the current density (A/cm.sup.2) when the elapsed time t is 1 second;
- said Equation 3 being approximately satisfied when said predetermined voltage is applied to said element, the value of m in said Equation 3 is 5, and the value of coefficient S exceeds 3.1.times.10.sup.-3,
- aging for at least a time t being performed such that the following Equation 4 is satisfied:
- log (S/5)-(4/5) log t<-3.2 Equation 4.
9 more elements
A nonlinear resistance element comprising a first conductive layer, an insulating layer, and a second conductive layer stacked in sequence on a substrate, wherein:
- said first conductive layer is a single-layer metal film whose main component is a metal to which is added 0.2 to 6 atom % tungsten,
- said insulating layer is an anodized layer of said first conductive layer,
- said second conductive layer is at least one of a chromium film and a transparent conductive film, and
- an activation energy of a thermal stimulation current TSC in said insulating layer is less than 0.7 eV.
1 more element
A nonlinear resistance element comprising a first conductive layer, an insulating layer, and a second conductive layer stacked in sequence on a substrate, wherein:
- said first conductive layer is a single-layer metal film whose main component is a metal to which is added 0.2 to 6 atom % tungsten,
- said insulating layer is an anodized layer of said first conductive layer,
- said second conductive layer is a transparent conductive film, and
- said transparent conductive film has a granular crystal structure, said structure comprising one or more crystals, wherein the ratio of long axis to short axis of the surface form of said crystals of the crystal structure is 3 to 1.
1 more element
A liquid crystal display device comprising:
- a first substrate provided with signal electrodes arranged in a predetermined pattern on said first substrate, nonlinear resistance elements connected to said signal electrodes, and pixel electrodes;
- a second substrate provided with opposing signal electrodes positioned to correspond with said pixel electrodes;
- and
- a liquid crystal layer located between said first substrate and said second substrate, wherein:
- said nonlinear resistance elements comprise a first conductive layer, an insulating layer, and a second conductive layer stacked in sequence on said first substrate, each of said pixel electrodes being connected to each of said second conductive layers of said nonlinear resistance elements, wherein:
- said first conductive layer is a single-layer metal film whose main component is a metal to which is added a chemical element having a valence 1 or 2 greater than that of said metal, in a concentration of 0.2 to 6 atom %, and
- said insulating layer is an anodized layer of said first conductive layer.
4 more elements
A liquid crystal display device comprising:
- a first substrate provided with signal electrodes arranged in a predetermined pattern on said first substrate, nonlinear resistance elements connected to said signal electrodes, and pixel electrodes;
- a second substrate provided with opposing signal electrodes positioned to correspond with said pixel electrodes;
- and
- a liquid crystal layer located between said first substrate and said second substrate, wherein:
- said nonlinear resistance elements comprise a first conductive layer, an insulating layer, and a second conductive layer stacked in sequence on said first substrate, each of said pixel electrodes being connected to each of said second conductive layers of said nonlinear resistance elements, wherein:
- said first conductive layer is a single-layer metal film whose main component is a metal to which is added a chemical element having a valence 1 or 2 greater than that of said metal, in a concentration of 0.2 to 6 atom %,
- said insulating layer is an anodized layer of said first conductive layer,
- said second conductive layer is at least one of a chromium film and a transparent conductive film, and
- a current density J of the current flowing through said element can be approximated by Equation 1 below, provided an activation energy Ea in said Equation 1 is no more than 0.534 eV:
- J=A exp (-Ea/kT) Equation 1
- where:
- A is a constant,
- k is Boltzmann's constant, and
- T is absolute temperature.
11 more elements
A liquid crystal display device comprising:
- a first substrate provided with signal electrodes arranged in a predetermined pattern on said first substrate, nonlinear resistance elements connected to said signal electrodes, and pixel electrodes;
- a second substrate provided with opposing signal electrodes positioned to correspond with said pixel electrodes;
- and
- a liquid crystal layer located between said first substrate and said second substrate, wherein:
- said nonlinear resistance elements comprise a first conductive layer, an insulating layer, and a second conductive layer stacked in sequence on said first substrate, each of said pixel electrodes being connected to each of said second conductive layers of said nonlinear resistance elements, wherein:
- said first conductive layer is a single-layer metal film whose main component is a metal to which is added a chemical element having a valence 1 or 2 greater than that of said metal, in a concentration of 0.2 to 6 atom %,
- said insulating layer is an anodized layer of said first conductive layer,
- said second conductive layer is at least one of a chromium film and a transparent conductive film, and
- if a current density in the element is J.sub.2 when a bias voltage of 10 V is applied after a current is injected for 10 seconds at a current density of 1 A/cm.sup.2, and J.sub.1 when a bias voltage of 10 V is applied after no current is injected, the following Equation 2 is approximately satisfied, where the constants B and n in said Equation 2 satisfy the relationships .vertline.B.vertline..ltoreq.0.2 and n<0:
- log (J.sub.2 /J.sub.1)=B.times.t.sup.1/n Equation 2
- where t is the elapsed time (in seconds) since the bias voltage was applied.
8 more elements
A liquid crystal display device comprising:
- a first substrate provided with signal electrodes arranged in a predetermined pattern on said first substrate, nonlinear resistance elements connected to said signal electrodes, and pixel electrodes;
- a second substrate provided with opposing signal electrodes positioned to correspond with said pixel electrodes;
- and
- a liquid crystal layer located between said first substrate and said second substrate, wherein:
- said nonlinear resistance elements comprise a first conductive layer, an insulating layer, and a second conductive layer stacked in sequence on said first substrate, each of said pixel electrodes being connected to each of said second conductive layers of said nonlinear resistance elements, wherein:
- said first conductive layer is a single-layer metal film whose main component is a metal to which is added a chemical element having a valence 1 or 2 greater than that of said metal, in concentration of 0.2 to 6 atom %,
- said insulating layer is an anodized layer of said first conductive layer,
- said second conductive layer is at least one of a chromium film and a transparent conductive film, and
- the following Equation 3 is approximately satisfied when a voltage within a predetermined range is applied to said element, provided the coefficient S in said Equation 3 is no more than 3.1.times.10.sup.-3 :
- log (J/J.sub.0,)=S.times.t.sup.1/m Equation 3
- where:
- t is the elapsed time (in seconds) since the drive was started,
- J is the current density (A/cm.sup.2) at elapsed time t,
- J.sub.0 is the current density (A/cm.sup.2) when the elapsed time t is 1 second, and
- m.gtoreq.1.
12 more elements
A liquid crystal display device comprising:
- a first substrate provided with signal electrodes arranged in a predetermined pattern on said first substrate, nonlinear resistance elements connected to said signal electrodes, and pixel electrodes;
- a second substrate provided with opposing signal electrodes positioned to correspond with said pixel electrodes;
- and
- a liquid crystal layer located between said first substrate and said second substrate, wherein:
- said nonlinear resistance elements comprise a first conductive layer, an insulating layer, and a second conductive layer stacked in sequence on said first substrate, each of said pixel electrodes being connected to each of said second conductive layers of said nonlinear resistance elements, wherein:
- said first conductive layer is a single-layer metal film whose main component is a metal to which is added a chemical element having a valence 1 or 2 greater than that of said metal, in a concentration of 0.2 to 6 atom %,
- said insulating layer is an anodized layer of said first conductive layer,
- said second conductive layer is at least one of a chromium film and a transparent conductive film, and
- the following Equation 3 is approximately satisfied when a voltage within a predetermined range is applied to said element:
- log (J/J.sub.0)=S.times.t.sup.1/m Equation 3
- where:
- t is the elapsed time (in seconds) since the drive was started,
- J is the current density (A/cm.sup.2) at elapsed time t, and
- J.sub.0 is the current density (A/cm.sup.2) when the elapsed time t is 1 second;
- said Equation 3 being approximately satisfied when said predetermined voltage is applied to said element, the value of m in said Equation 3 is 5, and the value of coefficient S exceeds 3.1.times.10.sup.-3,
- aging for at least a time t being performed such that the following Equation 4 is satisfied:
- log (S/5)-(4/5) log t<-3.2 Equation 4.
14 more elements
A liquid crystal display device comprising:
- a first substrate provided with signal electrodes arranged in a predetermined pattern on said first substrate, nonlinear resistance elements connected to said signal electrodes, and pixel electrodes;
- a second substrate provided with opposing signal electrodes positioned to correspond with said pixel electrodes;
- and
- a liquid crystal layer located between said first substrate and said second substrate, wherein:
- said nonlinear resistance elements comprise a first conductive layer, an insulating layer, and a second conductive layer stacked in sequence on said first substrate, each of said pixel electrodes being connected to each of said second conductive layers of said nonlinear resistance elements, wherein:
- said first conductive layer is a single-layer metal film whose main component is a metal to which is added a chemical element having a valence 1 or 2 greater than that of said metal, in a concentration of 0.2 to 6 atom %,
- said insulating layer is an anodized layer of said first conductive layer,
- said second conductive layer is at least one of a chromium film and a transparent conductive film, and
- an activation energy of a thermal stimulation current TSC in said insulating layer is less than 0.7 eV.
6 more elements
A liquid crystal display device comprising:
- a first substrate provided with signal electrodes arranged in a predetermined pattern on said first substrate, nonlinear resistance elements connected to said signal electrodes, and pixel electrodes;
- a second substrate provided with opposing signal electrodes positioned to correspond with said pixel electrodes;
- and
- a liquid crystal layer located between said first substrate and said second substrate, wherein:
- said nonlinear resistance elements comprise a first conductive layer, an insulating layer, and a second conductive layer stacked in sequence on said first substrate, each of said pixel electrodes being connected to each of said second conductive layers of said nonlinear resistance elements, wherein:
- said first conductive layer is a single-layer metal film whose main component is a metal to which is added a chemical element having a valence 1 or 2 greater that that of said metal, in a concentration of 0.2 to 6 atom %,
- said insulating layer is an anodized layer of said first conductive layer,
- said second conductive layer is a transparent conductive film, and
- said transparent conductive film has a granular crystal structure, said structure comprising one or more crystals, wherein the ratio of long axis to short axis of the surface form of said crystals of the crystal structure is 3 to 1.
6 more elements
Dependencies are inferred from the claim text.