Mercury cadmium telluride infrared filters and detectors and methods of fabrication
AssigneeRaytheon TI System, Inc.
InventorsDipankar Chandra, Donald F. Weirauch, Thomas C. Penn
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AssigneeRaytheon TI System, Inc.
InventorsDipankar Chandra, Donald F. Weirauch, Thomas C. Penn
Estimating the term…
A multiple film integrated infrared (IR) detector assembly 85 consists of detector films 86, 88, 90 having different IR spectral sensitivities which are deposited on a breadboard IR transmissive but electrically insulating substrate 42. Substrate 42 is deposited on an IR filter layer comprising an HgCdTe film 70. By various techniques described, filter film 70 has a varying composition from edge 68 to 72. This compositional gradient of film 70 results in varying IR spectral absorption as shown by IR transmission graphs 10, 12, 14. Film 70 acts as a graded IR filter in concert with the response of the detector films 86, 88, 90. By the proper choice of the compositional gradients in these films, and as a result the IR spectral response, an integrated IR spectrometer may be fabricated whereby each detector 86, 87, 90 detects only specific narrow bands of IR wavelengths.
A method of fabricating an integrated infrared detector assembly, comprising the steps of:
A method of fabricating an integrated IR detector assembly, said method comprising:
An integrated IR detector assembly, said assembly comprising:
An integrated IR detector assembly, said assembly comprising:
Dependencies are inferred from the claim text.