Scanning force microscope
AssigneeRaymax Technology, Inc.
InventorDavid J. Ray
Life of this patent
Estimating the term…
Abstract
A scanning force microscope (10) sometimes referred to as an atomic force microscope employs a laser (32) and a cantilever (28) which move proportionally to a moving reference frame (64). A fixed reference frame (11) contains optical components. A scanning mechanism creates relative movement between the fixed and moving reference frames. An optical assembly (114) is included which comprises at least one optical device in the fixed reference frame. The optical assembly permits initial alignment of the laser beam onto the cantilever and also permit the laser beam to follow the moving cantilever.
Claims10
A scanning force microscope comprising:
- (a) a light source;
- (b) a cantilever;
- (c) a scanning means for moving said light source and said cantilever relative to a sample;
- (d) an optical assembly comprising at least one optical component in the frame of reference of said sample;
- where said light source directs a light beam onto said optical assembly, and said assembly redirects said light beam onto said cantilever.
Dependencies are inferred from the claim text.