Method for the manufacture of a short-circuit free actuated mirror array

A method for the manufacture of an array of thin film actuated mirrors, the method comprising the steps of:

• providing an active matrix having an array of connecting terminals;
• forming a contact member on top of each of the connecting terminals;
• depositing a passivation layer on top of the active matrix after the formation of the contact member;
• forming a thin film sacrificial layer on top of the passivation layer:
• forming an array of actuating structures on top of the thin film sacrificial layer;
• wherein each of the actuating structures has an elastic member having a contact hole, a second thin film electrode, a thin film electrodisplacive member and a first thin film electrode;
• and
• removing the thin film sacrificial layer, thereby forming the array of thin film actuated mirrors.

A method for the manufacture of an array of thin film actuated mirrors, the method comprising the steps of:

• providing an active matrix comprising a substrate having an array of connecting terminals formed thereon;
• forming a contact member on top of each of the connecting terminals;
• forming a thin film sacrificial layer on top of the resulting structure;
• selectively removing a portion of the thin film sacrificial layer in a region above each of the contact members;
• forming an elastic layer on top of the resulting structure;
• forming a contact hole in at least said elastic layer such that each of the contact members are exposed;
• forming a second thin film layer on top of the resulting structure, said second thin film layer forming an electrical contact with each of the contact members;
• forming an electrodisplacive layer atop said second thin film layer;
• forming a first thin film layer on top of the electrodisplacive layer;
• and
• removing a remaining portion of the thin film sacrificial layer.