Photoresist for use in ink jet printers and other micro-machining applications
AssigneeInternational Business Machines Corporation
InventorsJeffrey Donald Gelorme, Nancy C. LaBianca
Life of this patent
Estimating the term…
Abstract
An inkjet printer head formed from a photoimageable organic material. This material provides for a spin-on epoxy based photoresist with image resolution and adhesion to hard to bond to metals such as gold or tantalum/gold surfaces that are commonly found in such printer applications. When cured, the material provides a permanent photoimageably defined pattern in thick films (>30) that has chemical (i.e high pH inks) and thermal resistance.
Claims11
An apparatus or micromachine comprising:
- a body of material comprising an admixture of an acrylite, a crosslinking
- agent and a reactive dilutent;
- a moving member interacting with said body of material;
- said body is disposed between a first and second substrate;
- said body driving a reservoir for a corrosive liquid.
An apparatus or micromachine comprising:
- a body of material comprising an admixture of an acrylate, a crosslinking agent and a reactive dilutent;
- a moving member interacting with said body of material;
- wherein said body of material has an opening, a micromachine has a heating element, said corrosive liquid when heated to a predetermined temperature is ejected from said opening.
An apparatus or micromachine comprising:
- a body of material comprising an admixture of an acrylate, a crosslinking agent and a reactive dilutent;
- a moving member interacting with said body of material;
- wherein said apparatus is an inkjet nozzle.
An apparatus or micromachine comprising:
- a body of material comprising an admixture of an acrylate, a crosslinking agent and a reactive dilutent;
- a moving member interacting with said body of material;
- wherein said body is selected from a group consisting of a diaphragm, a gear, a piston, a stem, a wheel, a bearing, a hinge, a sensor, a pump and an actuator.
A structure comprising:
- a substrate having a surface;
- a thermal barrier on at least a part of said surface;
- a resistive film on at least a part of said thermal barrier;
- a conductor film on at least a part of said resistive film;
- a protective layer on at least a part of said conductive film;
- said protective layer has a top surface;
- a first depression in said top surface for containing an ink;
- a second depression in said top surface fluidly connected to said first depression;
- said second depression has a means for heating said ink;
- a cover plate disposed over said top surface;
- said cover plate has a through-hole which is aligned with said second depression, said ink is ejected from said through-hole when said ink is heated in said second depression.
A structure comprising:
- a substrate having a surface;
- a patterned resist layer on said surface;
- a nozzle plate on said resist layer;
- said nozzle plate has through-hole disposed over said patterned resist;
- said pattern has a reservoir for an ink which is ejected from said through hole when said ink is heated by a heating means.
A structure comprising:
- a substrate having a surface;
- a patterned resist layer on said surface;
- a nozzle plate on said resist layer;
- said nozzle plate has through-hole disposed over said patterned resist;
- wherein said mixture is a composition of matter comprising an epoxy based photoresist with the following attributes:
- that is a low cost alternative to dry film, capable of being spin-coated to a thickness of 30 .mu.m, with excellent adhesion and bond strength to difficult metal surfaces such as gold or tantalum/gold, the capability of cured films to withstand high pH liquids and NMP for extended periods of time.
Dependencies are inferred from the claim text.