AC power supply controller for use in semiconductor fabrication facilities

A power supply controller for controlling the amount of power supplied to each of a plurality of fabrication facilities, each facility having different operation modes under which the facility is operated with different designated amounts of power, said power supply controller comprising:

• a commercial power line through which commercial electric power is to be delivered to the facilities;
• a power interruption detector detecting whether there is a power interruption in the commercial power line and generating an interruption detection signal indicative of whether the power interruption is detected;
• a back-up power supply delivering back-up electrical power to the facilities when the interruption detection signal is indicative of a power interruption in the commercial line;
• main controller means for generating a power selection signal in response to the interruption detection signal and for generating an operation starting signal;
• a main power supply operatively connected to said commercial power line, to said back-up power supply, and to said main controller so as to selectively supply the commercial electrical power or the back-up electrical power to the facilities in response to the power selection signal;
• a plurality of process status detector means operatively connected to the fabrication facilities, respectively, for detecting the operation modes of each of the facilities, and generating a mode detection signal indicative of the operation mode of the facility to which the detector means is operatively connected;
• a plurality of unit controller means operatively connected to said main controller for being activated by the operation starting signal, each of said unit controllers also being operatively connected to a respective one of said process status detectors for selectively generating one of a plurality of different power control signals in response to the mode detection signal, and each of which power control signals corresponds to at least one respective operation mode of the corresponding facility;
• and
• a plurality of power supply means operatively connected to said unit, controller means respectively, and activated in response to the power control signal generated by the respective unit controller means connected thereto for regulating the amount of electrical power supplied from the main power supply to the corresponding facility to a designated amount based on the operation mode of the corresponding facility.