Beam generator

A method of generating a high flux density neutral atom or molecule beam which comprises:

• generating a plasma of electrons and ionized atoms or molecules, applying a voltage across the plasma, accelerating the ions in one direction and drawing an electron flow in the opposite direction, establishing a magnetic field perpendicular to the electric field decreasing electron mobility along the direction of the electric field, positioning a cathode close to the exit of the beam emitting electrons providing charge neutralization, effecting a charge exchange between accelerated ionized atoms or molecules and neutral atoms or molecules and converting moving ions to moving neutral atoms or molecules, coupling a plasma generating source selected from a helicon source, an ECR source, or a novel source, removing the charged entities from the flow by passing the plasma through an electrostatic or magnetic filter to filter out charge entities, or by effecting charge exchange and recombination, thus providing a neutral atom or molecule beam.