Anhydrous mononuclear tris(.beta.-diketonate) bismuth compositions for deposition of bismuth-containing films, and method of making the same
AssigneeAdvanced Technology Materials, Inc.
InventorsThomas H. Baum, Gautam Bhandari, Margaret Chappuis
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Abstract
Anhydrous mononuclear tris(.beta.-diketonato)bismuth complexes, useful as precursors for chemical vapor deposition of bismuth, for producing Bi-containing films of significantly improved stoichiometry, morphology and functional character, as compared to films obtained from dinuclear tris(.beta.-diketonato)bismuth complexes of the prior art.
Claims13
Anhydrous mononuclear tris(.beta.-diketonato)bismuth.
An anhydrous mononuclear tris(.beta.-diketonato)bismuth complex, wherein the .beta.-diketonato ligand is selected from the group consisting of:
- 2,2,6,6-tetramethyl-3,5-heptanedionato;
- 1,1,1-trifluoro-2,4-pentanedionato;
- 1,1,1,5,5,5-hexafluoro-2,4-pentanedionato;
- 6,6,7,7,8,8,8-heptafluoro-2,2-dimethyl-3,5-octanedionato;
- 2,2,7-trimethyl-3,5-octanedionato;
- 1,1,1,5,5,6,6,7,7,7-decafluoro-2,4-heptanedionato;
- and
- 1,1,1-trifluoro-6-methyl-2,4-heptanedionato.
Anhydrous mononuclear tris(2,2,6,6-tetramethyl-3,5-heptanedionato)bismuth.
Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)bismuth having a melting point of about 139.degree. C.
Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)bismuth having the x-ray crystallographic structure shown in FIG. 4.
A method of synthesis of an anhydrous mononuclear tris (.beta.-diketonato)bismuth complex, comprising reacting a corresponding Na(.beta.-diketonato) compound with a Bi trihalide compound in an aprotic solvent medium under anaerobic conditions for sufficient time and at sufficient temperature to yield said anhydrous mononuclear tris (.beta.-diketonato)bismuth complex as a reaction product thereof.
A method of synthesis of anhydrous mononuclear tris(2,2,6,6-tetramethyl-3,5-heptanedionato)bismuth, comprising reaction of Na(2,2,6,6-tetramethyl-3,5-heptanedionato) and BiCl.sub.3 in an aprotic solvent medium under anaerobic conditions.
Dependencies are inferred from the claim text.