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US 5,858,859 AGranted
Semiconductor device having a trench for device isolation fabrication method
AssigneeKabushiki Kaisha Toshiba
InventorsNaoto Miyashita, Koichi Takahashi
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Abstract
A device-isolating trench having a taper at its upper portion is formed in a silicon semiconductor substrate. Then, a silicon oxide film is formed on the inner wall of the trench and the surface of the semiconductor substrate near the trench by an oxidizing method, and polycrystalline silicon is buried in the trench.
Claims1
A method of fabricating a semiconductor device, comprising the steps of:
- forming a first oxide film on a semiconductor substrate;
- forming a nitride film on said first oxide film;
- forming a second oxide film on said nitride film;
- forming a trench for a device-isolating trench formation by etching said first oxide film, nitride film, and second oxide film;
- forming a device-isolating trench by performing an etching by RIE on said semiconductor substrate exposed to the interior of said trench for a device-isolating trench formation;
- removing a reactive compound attached to a side surface of said trench for a device-isolating trench by performing a wet etching, and eliminating said second oxide film and said first oxide film at an upper corner portion of said device-isolating trench;
- removing said semiconductor substrate at an upper corner portion of said device-isolating trench by an anisotropic plasma etching;
- removing said first oxide film and nitride film;
- forming a non-oxidation film on a portion of a device region;
- and
- oxidizing a portion of a surface of device regions of said semiconductor substrate and an inner wall of said device-isolating trench with said non-oxidation film serving as a mask.
8 more elements
Dependencies are inferred from the claim text.