Phase shifting circuit manufacture method and apparatus
AssigneeNumerical Technologies, Inc.
InventorsYao-Ting Wang, Yagyensh C. Pati
Life of this patent
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Abstract
A method and apparatus for creating a phase shifting mask and a structure mask for shrinking integrated circuit designs. One embodiment of the invention includes using a two mask process. The first mask is a phase shift mask and the second mask is a single phase structure mask. The phase shift mask primarily defines regions requiring phase shifting. The single phase structure mask primarily defines regions not requiring phase shifting. The single phase structure mask also prevents the erasure of the phase shifting regions and prevents the creation of undesirable artifact regions that would otherwise be created by the phase shift mask. Both masks are derived from a set of masks used in a larger minimum dimension process technology.
Claims12
A method of generating a set of mask definitions corresponding to a set of masks for fabricating at least a layer of material of a circuit using a first manufacturing process having a first minimum realizable dimension, said method comprising:
- accessing a first data set defining at least a portion of a layout of said circuit corresponding to said layer, said layout being for a second manufacturing process having a second minimum realizable dimension, said second minimum realizable dimension being greater than said first minimum realizable dimension;
- identifying a first set of areas in said layout, destructive light interference being used to realize a dimension of a first set of structures in said layer corresponding to areas in the first set of areas;
- creating a first mask definition defining a set of phase shifting areas for realizing said first set of structures;
- and,
- creating a second mask definition defining a second set of areas in said layout, said second set of areas including at least some areas in said layout defining a second set of structures in said layer and not using destructive light interference to be realized, wherein said first mask definition and said second mask definition are included in said set of mask definitions.
A set of masks for use in an integrated circuit manufacturing process, said set of masks comprising:
- a first mask having primarily phase shifting areas and first opaque areas;
- and,
- a second mask having second opaque areas and clear areas, said second opaque areas for defining a set of structures not requiring phase shifting for realization and for preventing erasure of structures created by the first mask, and said clear areas for further defining said set of structures and for preventing the creation of artifact structures that would otherwise be created by the first mask.
Dependencies are inferred from the claim text.