Novolac polymer planarization films for microelectronic structures
AssigneeAlliedSignal Inc.
InventorJames Steven Drage
Life of this patent
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Abstract
An improved method for forming planarization films which remain adhered to substrates upon exposure to heat comprising first applying a polymeric solution containing a low molecular weight novolac resin, a surfactant selected from the group consisting of a non-fluorinated hydrocarbon, a fluorinated hydrocarbon and combinations thereof, and an optional organic solvent to a substrate, followed by heating the substrate.
Claims25
In a process of forming a continuous planarization film onto a substrate such that said film remains adhered to said substrate upon exposure to heat, the improvement comprising:
- (a) applying to a surface of said substrate a polymeric solution comprising a low molecular weight novolac resin having the formula ##STR2## wherein each R is independently hydrogen or a hydrocarbon group containing up to 20 carbon atoms and n ranges from between 2 and 200;
- and a surfactant selected from the group consisting of a non-fluorinated hydrocarbon, a fluorinated hydrocarbon and combinations thereof;
- and
- (b) heating said solution and substrate to form a continuous planarized film on said surface.
In a process of forming a continuous planarization film onto a substrate such that said film remains adhered to said substrate upon exposure to heat, the improvement comprising:
- (a) centrally applying to a surface of said substrate a polymeric solution comprising a low molecular weight novolac resin having the formula ##STR3## wherein each R is independently hydrogen or a hydrocarbon group containing up to 20 carbon atoms and n ranges from between 2 and 200;
- and a surfactant selected from the group consisting of a non-fluorinated hydrocarbon, a fluorinated hydrocarbon and combinations thereof;
- (b) spinning said substrate at a speed of 1500 rpm to 4000 rpm for a time sufficient to spread said solution evenly across said surface of said substrate;
- and
- (c) heating said solution and substrate to form a continuous planarized film on said substrate.
A substrate having a continuous planarizing film applied thereon, said film comprising a novolac resin having the formula ##STR4## wherein each R is independently hydrogen or a hydrocarbon group containing up to 20 carbon atoms and n ranges from between 2 and 200;
- and a surfactant selected from the group consisting of a non-fluorinated hydrocarbon, a fluorinated hydrocarbon, and combinations thereof.
A composition comprising, based upon the total weight of the composition:
- from about 1 to about 90 weight percent of a novolac resin;
- from about 0.01 to about 5 weight percent of a surfactant selected from the group consisting of a fluorinated hydrocarbon, a non-fluorinated hydrocarbon and combinations thereof;
- and
- from about 0 to about 90 percent of an organic solvent.
Dependencies are inferred from the claim text.