Process for bonding semiconductor chip
AssigneesAnam Semiconductor Inc., Amkor Technology, Inc.
InventorsSeong Min Seo, Jae Hwan Song
Life of this patent
Estimating the term…
Loading patent…
AssigneesAnam Semiconductor Inc., Amkor Technology, Inc.
InventorsSeong Min Seo, Jae Hwan Song
Estimating the term…
An improved process for bonding a semiconductor chip to a substrate is disclosed. In the process, a gold bump is formed on an aluminum bond pad of the chip thus forming a flip chip. A screen with an opening is placed on the substrate prior to dotting insulating epoxy on the opening. The epoxy is bladed with a printing blade thus forming an epoxy layer having a predetermined area and uniform thickness. The flip chip is, thereafter, placed on the substrate such that the gold bump is brought into electrical contact with a lead finger of the substrate through thermocompression bonding. Then the chip and substrate are put in an oven in order to permanently cure the epoxy layer. It is preferable to precure the epoxy layer prior to the permanent curing step thereby allowing thermal stress to be distributed to both the gold bump and the precured epoxy layer.
A process for bonding a semiconductor chip to a substrate comprising:
Dependencies are inferred from the claim text.