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US 5,858,103 AGranted
Vertical wafer boat
AssigneeAsahi Glass Company, Limited
InventorsToshio Nakajima, Hisao Yamamoto
Life of this patent
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Abstract
A radius of 0.1-1 mm is provided at a corner between a bottom of each of semiconductor wafer inserting and supporting grooves and a base of a supporting piece between the supporting groove and a supporting groove adjacent thereto, which are formed in bars connecting upper and lower end plates of a vertical wafer boat.
Claims10
A vertical wafer boat comprising:
- a pair of end plates arranged at an upper position and a lower position;
- a plurality of bars connecting the end plates;
- supporting grooves formed in the bars at certain distances to receive and support semiconductor wafers;
- and
- comb-teeth shaped supporting pieces, each being provided between adjoining supporting grooves;
- wherein the end plates, the bars, the supporting grooves and the supporting pieces are made of a material including silicon carbide as a main component, and a corner between a bottom of each of the supporting grooves and a base of the supporting piece adjoining thereto is rounded with a radius of 0.1-1 mm.
3 more elements
Dependencies are inferred from the claim text.