Photolithographic technique of emitter tip exposure in FEDS
AssigneeMicron Display Technology, Inc.
InventorDavid Zimlich
Life of this patent
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Abstract
Aligned gate structures for field emitter display devices are formed by overlaying a substrate, having at least one emitter tip thereon, successively with an insulating layer, a conductive layer, and a photoresist layer. The photoresist layer is then exposed to create fixed and unfixed regions. The unfixed regions are developed and etched to remove the conductive layer under the unfixed regions. The insulating layer is then etched to expose the emitter tips and the photoresist layer removed.
Claims13
A method for forming structures for field emission display devices comprising:
- providing a substrate;
- using a mask to form a cap over a portion of said substrate;
- forming an emitter tip under said cap;
- overlaying said substrate and tip with a first layer;
- overlaying said first layer with a second layer;
- overlaying said second layer with a photoresist layer;
- using said mask to expose said photoresist layer to create an unfixed region over said tip;
- removing the unfixed region;
- etching to remove the second layer under the unfixed region;
- etching the first layer to expose the emitter tip;
- and
- removing the photoresist layer.
A method for forming structures for field emission display devices, comprising:
- providing a substrate;
- using a mask to form a cap over a portion of said substrate;
- forming an emitter tip under said cap;
- overlaying said substrate and tip with a first layer;
- overlaying said first layer with a second layer;
- overlaying said second layer with a first photoresist layer;
- using said mask to expose said first photoresist layer to create an unfixed region over said tip;
- etching said first photoresist layer to remove said second layer under said unfixed region;
- overlaying with a third layer;
- coating said third layer with a second photoresist;
- exposing second photoresist layer to create fixed and unfixed regions;
- etching said second photoresist to remove said third layer and expose the tip.
A method for forming structures for field emission display devices comprising:
- generating a first mask;
- providing a substrate;
- using one of said first mask and a mask derived from said first mask to form a cap over a portion of said substrate;
- forming an emitter tip under said cap;
- forming a first layer over said substrate and tip;
- forming a second layer over said first layer;
- forming a photoresist layer over said second layer;
- using one of said first mask and a mask derived from said first mask to expose said photoresist layer to create an unfixed region over said tip;
- removing the unfixed region;
- removing the second layer under the unfixed region;
- and
- removing the first layer under the unfixed region.
Dependencies are inferred from the claim text.