Processing of materials for uniform field emission
AssigneeSandia Corporation
InventorsLawrence S. Pam, Thomas E. Felter, Alec Talin, Douglas Ohlberg, Ciaran Fox, Sung Han
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AssigneeSandia Corporation
InventorsLawrence S. Pam, Thomas E. Felter, Alec Talin, Douglas Ohlberg, Ciaran Fox, Sung Han
Estimating the term…
This method produces a field emitter material having a uniform electron emitting surface and a low turn-on voltage. Field emitter materials having uniform electron emitting surfaces as large as 1 square meter and turn-on voltages as low as 16V/.mu.m can be produced from films of electron emitting materials such as polycrystalline diamond, diamond-like carbon, graphite and amorphous carbon by the method of the present invention. The process involves conditioning the surface of a field emitter material by applying an electric field to the surface, preferably by scanning the surface of the field emitter material with an electrode maintained at a fixed distance of at least 3 .mu.m above the surface of the field emitter material and at a voltage of at least 500V. In order to enhance the uniformity of electron emission the step of conditioning can be preceeded by ion implanting carbon, nitrogen, argon, oxygen or hydrogen into the surface layers of the field emitter material.
A method for creating field emitter materials having a substantially uniform electron emitting surface by the step of applying an electric field to the surface of an ion implanted field emitter material.
A method for improving the uniformity of electron emission and lowering the turn-on voltage of a field emitter material, comprising the step of conditioning said field emitter material by applying an electric field to a surface of a film of said field emitter material.
A method for preparing a diamond film having uniform electron emitting properties and a low turn-on voltage, comprising the steps of:
Dependencies are inferred from the claim text.