Work transporting robot and semiconductor device manufacturing apparatus

A semiconductor device manufacturing apparatus comprising,

• a central chamber,
• a plurality of process chambers each of which is disposed at a predetermined position of the central chamber, and
• a work transporting robot which is in the central chamber, said work transporting robot including:
• first, second and third arms each of which is rotationally moved within a plane around a common axis by an individual driving source, the planes being parallel to one another,
• a first pair of coupled arms with ends which are coupled together, said first pair of coupled arms being rotatably connected at one end to the second arm and connected at the other end to the first arm,
• a first work supporting table which is connected to the coupled ends of the first pair of coupled arms,
• a second pair of coupled arms with ends which are coupled together, said second pair of coupled arms being rotatably connected at one end to the second arm and connected at the other end to the third arm,
• a second work supporting table which is connected to the coupled ends of the second pair of coupled arms,
• the first and third arms both being movable to positions located on a same side of a plane which includes the axis and the second arm.

A semiconductor device manufacturing apparatus comprising,

• a central chamber,
• a plurality of process chambers each of which is disposed at a predetermined position of the central chamber,
• a work transporting robot which is in the central chamber, said work transporting robot including:
• first and second arms each of which is rotationally moved within a plane around a common axis by an individual driving source, the planes being parallel to one another, the first and second arms each having first and second arm sections which extend from a central section which is at said axis, said arm sections of said first arm having lengths which are different from the lengths of the arm sections of the second arm, and
• a first pair of coupled arms, one of which is rotatably connected to a first arm portion of the first arm and a another of which is rotatably connected to a first arm portion of the second arm, said arms of said first pair of coupled arms being connected to one another, and a work supporting table connected to one of the first pair of coupled arms,
• a second pair of coupled arms, one of which is connected to a second arm portion of the first arm and the other of which is connected to a second arm portion of the second arm, said second pair of coupled arms being connected to one another, and a work supporting table connected to one of the second pair of coupled arms.