Valve drive control method, valve drive control apparatus and fluid member supply apparatus

A fluid member supply control apparatus equipped with a fluid member supply unit, a fluid member flow-out unit, and at least one valve provided within a tube path for connecting said fluid member supply unit to said fluid member flow-out unit, for changing an open degree of a communication unit for communicating a fluid member flow-in tube path with a fluid member flow-out tube path to thereby control a fluid condition of the fluid member, wherein:

• said at least one valve includes:
• a control medium storage chamber into which an attenuation characteristic control medium is filled,
• wherein said attenuation characteristic control medium includes a fluid having a viscosity attenuation characteristic, powder, or a mixture of a fluid and powder;
• an elastic deform member for defining said control medium storage chamber and said communication unit;
• a drive unit for pressuring said attenuation characteristic control medium to deform said elastic deform member via said attenuation characteristic control medium;
• and
• control means for controlling said drive unit based on a drive control value obtained from a valve drive characteristic representative of a relationship between a deform amount of a valve mechanism unit and a drive pressure value of the valve mechanism unit, said valve drive characteristic being acquired from a dynamic fluid characteristic of said fluid member and a dynamic fluid characteristic of said attenuation characteristic control medium.